Vacuum Deposition Injector Diffuser Spatial Nozzle Distribution
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Solution Overview
Problem
Existing vacuum deposition systems face challenges in achieving uniformity of deposition, high throughput, repeatability, and minimizing downtime for diffuser cleaning or replacement, particularly due to non-uniform nozzle distributions and material corrosion, which affects the quality and efficiency of thin film deposition processes.
Innovation Solution
The implementation of a diffuser with a spatially varying nozzle distribution, featuring removable diffuser inserts with different geometries and spacings, allows for adjustable nozzle configurations to optimize material distribution and reduce non-uniformity, and a calibration process to achieve desired uniformity profiles, along with the use of corrosion-resistant materials for inserts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If identical nozzles are used equidistantly along the longitudinal axis, then the injector structure is simple and easy to manufacture, but the deposition uniformity across the substrate surface deteriorates
Solution Approach 1:
The patent applies local quality by using nozzles with different geometries at different positions along the longitudinal axis. Specifically, nozzles at the ends of the diffuser have different outlet aperture dimensions compared to nozzles in the middle section, creating spatially varying local properties to compensate for material loss at extremities and achieve uniform deposition across the substrate.
Solution Approach 2:
The patent implements asymmetry by breaking the symmetric arrangement of identical nozzles. The diffuser employs asymmetric nozzle geometry where nozzles at different longitudinal positions have different outlet aperture dimensions, creating an asymmetric configuration that compensates for the natural material loss pattern in vacuum deposition systems.
2Ease of manufacture
If the diffuser is made with fixed nozzle geometry, then the manufacturing process is simple, but the adaptability to different substrate sizes and applications deteriorates
Solution Approach 1:
The patent applies segmentation by dividing the diffuser into modular nozzle units with interchangeable inserts. Each nozzle can be independently configured or replaced, allowing the same diffuser structure to be adapted to different substrate sizes and deposition requirements by changing individual nozzle inserts rather than manufacturing entirely different diffusers.
Solution Approach 2:
The patent implements dynamics by making the nozzle geometry adjustable and reconfigurable. The removable inserts with different geometries allow the diffuser to dynamically adapt its characteristics based on the specific application requirements, substrate size, and material properties, transforming a static fixed geometry into a flexible dynamic system.
3Quantity of substance
If vaporized materials are diffused through the diffuser, then material distribution is achieved, but material loss due to diffusion into the chamber deteriorates throughput
Solution Approach 1:
The patent addresses material loss by applying local quality through spatially varying nozzle geometries. Nozzles at the ends of the diffuser have different outlet aperture dimensions optimized for their position, reducing the diffusion of materials into the chamber walls at extremities while maintaining adequate material distribution across the substrate surface.
Solution Approach 2:
The patent converts the harmful effect of material diffusion into a beneficial pattern by strategically designing asymmetric nozzle geometries that exploit the diffusion phenomenon. The different outlet aperture dimensions at different positions are optimized to transform the natural diffusion pattern into a useful distribution profile that achieves uniform deposition while minimizing material loss to chamber walls.
4Reliability
If corrosion-resistant materials are used for diffuser inserts, then the repeatability of diffusion profiles over time is improved, but the manufacturing cost increases
Solution Approach 1:
The patent applies segmentation by using removable inserts that can be independently manufactured and replaced. This modular approach allows the use of corrosion-resistant materials only for the critical insert portions that contact vaporized materials, while the main diffuser body can be made from more economical materials, balancing cost and reliability.
Solution Approach 2:
The patent implements the principle of using replaceable inserts that can be easily manufactured and swapped. Rather than making the entire diffuser from expensive corrosion-resistant materials, the design allows for economical inserts to be used initially, with the option to replace them if corrosion occurs, achieving cost-effectiveness while maintaining reliability through the modular replaceable architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the uniformity and throughput of material deposition, improves the repeatability of the process over time, and reduces downtime for maintenance, enabling versatility across different applications and substrate sizes.
Implementation Method 1
The vacuum evaporation source evaporates or sublimates materials, which are transferred in gaseous form to the vacuum deposition chamber
Implementation Method 2
The vacuum evaporation source evaporates or sublimates materials, which are transferred in gaseous form to the vacuum deposition chamber
Implementation Method 3
The diffuser sprays said vaporized materials on the substrate along the length of the diffuser
Data Source
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AI summary
The present invention concerns an injector for a vacuum vapour deposition system, said injector comprising an injection duct suitable for receiving vaporized materials from a vacuum evaporation source and a diffuser comprising a plurality of nozzles for diffusing said vaporized materials into a vacuum deposition chamber, each nozzle comprising a channel suitable for connecting said injection duct to said deposition chamber. According to the invention, said diffuser has a spatially varying nozzle distribution. The invention also concerns a process for calibrating an injector and a process for manufacturing a diffuser for an injector.