Vacuum Divider for Differential Pumping in Turbo-Molecular Pumps
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Solution Overview
Problem
Current turbo-molecular pumps require multiple units and increased space and cost to evacuate multiple high vacuum regions, leading to bulky and expensive vacuum systems.
Innovation Solution
A vacuum divider is positioned between the rotor blades of a turbo-molecular pump and a vacuum manifold, allowing gas to pass from multiple vacuum chambers to a single turbo-molecular pump, enabling differential pumping without significant cost or space increases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple turbo-molecular pumps are used to evacuate multiple high vacuum regions, then the pumping capability for multiple vacuum regions is improved, but the system cost and space requirements increase significantly
Solution Approach 1:
The vacuum divider segments the single high vacuum inlet of the turbo-molecular pump into multiple separate vacuum regions. Each region can be independently evacuated while sharing the same pump, thereby providing multi-region pumping capability without requiring multiple pumps.
Solution Approach 2:
The vacuum divider enables a single turbo-molecular pump to serve multiple vacuum regions simultaneously, making the pump multi-functional. This eliminates the need for separate pumps for each vacuum region, reducing both system cost and space requirements while maintaining pumping capability.
2Productivity
If compound or split flow turbo-molecular pumps are used to create multiple vacuum regions, then the pumping capability for multiple regions is improved, but the system cost and space requirements increase
Solution Approach 1:
The vacuum divider physically segments the inlet flow into separate paths for different vacuum regions, allowing independent pumping of each region while using a single pump unit.
Solution Approach 2:
The vacuum divider acts as an intermediary component between the single turbo-molecular pump and multiple vacuum regions. It mediates the connection, enabling the pump to service multiple regions without requiring complex pump modifications or multiple pump units.
3Strength
If a support structure is added to the turbo-molecular pump for rotor shaft bearing, then the pump structural integrity is improved, but the ability to create multiple vacuum regions is not achieved
Solution Approach 1:
The vacuum divider is designed to mate with the existing support structure, transforming it from a purely structural component into a multi-functional element that also serves to create and define multiple vacuum regions.
Solution Approach 2:
The support structure serves dual purposes: maintaining rotor shaft bearing integrity and providing the framework for creating multiple vacuum regions through the vacuum divider integration.
Data Source
AI summary
A vacuum divider is positioned between rotor blades of a turbo-molecular pump and a vacuum manifold formed from multiple vacuum chambers. A first coupling aperture passes through the vacuum divider and allows gas to pass from a first of the multiple vacuum chambers to the turbo-molecular pump. A second coupling aperture passes through the vacuum divider and allows gas to pass from a second of the multiple vacuum chambers to the turbo-molecular pump.