Elastomer-Bonded Vacuum Door Seals With 3D Surface Patterning
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for sealing in semiconductor processing, such as using gaskets with adhesive binders, are prone to performance variations and seal failure due to debonding issues, which affect the integrity and reliability of the seal.
Innovation Solution
A method involving the direct deposition of a 3D surface pattern layer followed by a seal material layer onto a sealing surface, eliminating the need for adhesive binders and allowing for customizable and repeatable seal formation using 3D printing, enabling improved adhesion and sealing integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If adhesive binder is used to bond gaskets to grooves or flat surfaces, then gaskets can be attached to sealing surfaces, but performance variations and seal failure occur due to binder composition variations, application variations, and debonding
Solution Approach 1:
The patent removes the adhesive binder from the sealing system entirely. Instead of using a separate binder layer that can vary in composition and application, the seal is directly bonded to the sealing surface through mechanical interference features (such as grooves or recesses) that provide both attachment and sealing functionality in a single integrated structure.
Solution Approach 2:
The patent combines the functions of attachment and sealing into a single integrated seal structure. The seal includes both the sealing element and the bonding mechanism (such as integrally formed grooves or recesses) as one unified component, eliminating the need for separate adhesive binder application and ensuring consistent performance.
2Strength
If adhesive binder is applied to bond gaskets, then gaskets can be attached to sealing surfaces, but debonding causes seal failure
Solution Approach 1:
The patent incorporates bonding features (such as grooves, recesses, or mechanical interference elements) directly into the seal structure during manufacturing, before the seal is installed. This preliminary integration ensures that the bond strength is inherent to the structure itself rather than relying on separately applied adhesive that may debond over time.
3Ease of manufacture
If adhesive binder composition and application vary, then different bonding results occur, but this leads to performance differences in the gasket
Solution Approach 1:
The patent changes the fundamental parameter of bonding from chemical adhesive to mechanical interference. By using physical features such as grooves, recesses, or interlocking geometries, the bonding mechanism becomes independent of adhesive composition and application variables, ensuring consistent performance while maintaining manufacturing flexibility through design variations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances sealing performance by increasing the surface area for adhesion, stabilizing the seal material, and allowing for automated and repeatable seal customization, reducing variations and improving the reliability of seals in semiconductor processing components.
Implementation Method 1
depositing a first layer directly onto a sealing surface of a body, wherein the first layer includes a 3D surface pattern
Implementation Method 2
depositing a second layer onto the first layer, wherein the second layer includes a seal material
Implementation Method 3
the 3D surface pattern increases the available surface area for attaching the second layer, thereby improving adhesion
Data Source
AI summary
Embodiments of methods of fabricating and refurbishing a component having a seal are provided. A method of fabricating a component having a seal includes: depositing a first layer directly onto a sealing surface of a body, wherein the first layer includes a 3D surface pattern; and depositing a second layer onto the first layer, wherein the second layer includes a seal material. A method of refurbishing a component having a seal includes: providing a component including a body and a seal attached to the body; removing at least a portion the seal from a sealing surface of the body to form an exposed portion of the sealing surface; depositing a first layer directly onto the exposed portion of the sealing surface, wherein the first layer includes a 3D surface pattern; and depositing a second layer onto the first layer, wherein the a second layer includes seal material.