Vacuum Drying Apparatus for Wafer Storage Containers
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Solution Overview
Problem
In semiconductor wafer storage, insufficient drying of wafer storage containers can lead to contamination and product defects, as existing drying processes lack confirmation of dry conditions and are inefficient.
Innovation Solution
A drying apparatus with a vacuum chamber and controller that performs decompression processing to confirm dry conditions by measuring pressure changes after additional decompression, ensuring sufficient drying without unnecessary extended processing times.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If drying processing is executed under preset conditions without confirmation, then the drying process is simple and quick, but the dry condition cannot be confirmed and insufficient drying may occur
Solution Approach 1:
The patent implements a feedback mechanism where the controller monitors pressure changes during decompression and uses this information to determine whether drying is sufficient. The controller executes additional decompression processing and compares pressure readings to confirm dry condition, creating a closed-loop system that ensures reliable drying confirmation without requiring overly complex equipment.
Solution Approach 2:
The patent replaces complex mechanical drying verification systems with a pressure-based detection method. Instead of using complex sensors or physical inspection mechanisms, the system uses pressure measurements during decompression to infer dry condition, simplifying the device while maintaining reliability.
2Reliability
If drying time is lengthened to ensure sufficient drying, then the dry condition is confirmed, but the processing time becomes excessively long and inefficient
Solution Approach 1:
The controller uses real-time pressure monitoring during decompression to provide feedback on drying status. When pressure changes indicate sufficient drying, the controller stops the drying process early, avoiding unnecessary extended processing time while ensuring drying sufficiency through objective pressure-based confirmation.
Solution Approach 2:
The system performs preliminary decompression processing during the drying cycle to assess dry condition. By conducting additional decompression processing at predetermined intervals, the system can determine drying sufficiency before the drying process naturally completes, allowing for optimized time management.
3Measurement precision
If additional decompression processing is executed to confirm dry condition, then the dry condition can be determined accurately, but the processing steps increase
Solution Approach 1:
The patent uses pressure measurements during decompression to accurately determine dry condition, replacing complex mechanical or physical inspection methods. The controller monitors pressure changes and uses these measurements to confirm drying status, achieving accurate measurement through a relatively simple pressure-based approach.
Solution Approach 2:
The system changes the pressure parameter during decompression processing to assess dry condition. By monitoring how pressure changes (or fails to change) during additional decompression steps, the system obtains accurate information about drying status. This parameter-based approach provides measurement precision without requiring complex processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively confirms dry conditions, preventing contamination and optimizing drying efficiency by determining the sufficiency of drying based on pressure thresholds, thus reducing the risk of defects and streamlining the drying process.
Implementation Method 1
a decompression device that decompresses the inside of the drying chamber... executing a drying processing of evaporating and removing moisture from the drying processing target
Implementation Method 2
executes an additional decompression processing of lowering a pressure of the inside of the drying chamber below a pressure at a time of the drying processing
Data Source
AI summary
According to one embodiment of the present disclosure, a drying apparatus includes a drying chamber that holds a drying processing target in an inside thereof, a decompression device that decompresses the inside of the drying chamber; and a controller that controls the decompression device to decompress the inside of the drying chamber, thereby executing a drying processing of evaporating and removing moisture from the drying processing target. The controller executes, after the drying processing, an additional decompression processing of lowering a pressure of the inside of the drying chamber below a pressure at a time of the drying processing, for a predetermined time and determines a dry condition of the drying processing target based on a pressure of the inside of the drying chamber that has been reached after the additional decompression processing.