Vacuum Robot Electrostatic Gripper for Higher Acceleration

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Solution Overview

Problem

Material-handling robots in vacuum environments face limitations due to passive payload holding, which restricts acceleration and increases operation duration, and active gripping is challenging due to vacuum compatibility issues and contamination risks.

Innovation Solution

A vacuum-compatible robot with integrated electrically-operated payload grippers using dielectric substrates and electrodes to generate attractive forces, allowing for higher acceleration and reduced contamination risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If passive friction-based payload holding is used, then the system maintains vacuum compatibility and avoids contamination, but the acceleration is limited and operation duration increases

Engineering Contradiction:

Improvevacuum compatibilityVSAvoidoperation duration

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent replaces the passive mechanical friction-based holding system with an active electrostatic gripping system. The electrostatic gripper uses electric fields to generate holding forces, substituting mechanical contact and friction with field-based interaction, enabling higher acceleration while maintaining vacuum compatibility.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental parameter of payload holding from passive friction to active electrostatic force. By applying voltage to create electric fields between the gripper electrodes and the payload, the system achieves controllable holding forces that are not limited by friction coefficients, thereby increasing acceleration capability.

Inventive Principle:

Principle #35Parameter changes

2Force

If active mechanical gripping components are added, then payload holding force increases, but contamination risk increases due to particulate matter from moving components

Engineering Contradiction:

Improvepayload holding forceVSAvoidcontamination risk

Core Design Contradiction:

ForceVSObject-affected harmful factors

Solution Approach 1:

The patent eliminates moving mechanical gripping components by using an electrostatic field-based gripping mechanism. The electrostatic gripper holds payloads through electric fields without mechanical contact or relative motion, thereby preventing the generation of particulate matter and contamination while providing strong holding forces.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an electric field as an intermediary between the gripper and the payload. This field-based interaction medium allows force transmission without direct mechanical contact, avoiding the contamination issues associated with mechanical components while maintaining effective payload holding.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Device complexity

If friction-based passive holding is used, then the system structure remains simple, but acceleration is limited below slippage thresholds

Engineering Contradiction:

Improvesystem structureVSAvoidacceleration

Core Design Contradiction:

Device complexityVSSpeed

Solution Approach 1:

The patent replaces the simple but limited friction-based mechanical system with an electrostatic gripping system that provides controllable, high-magnitude holding forces. The electrostatic mechanism enables high acceleration by generating forces well above the slippage threshold through voltage-controlled electric fields.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent fundamentally changes the force generation mechanism from friction-dependent to electrostatic-field-dependent. By controlling the voltage applied to the gripper electrodes, the system can dynamically adjust holding forces to match payload requirements, enabling high acceleration without slippage.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables higher payload holding forces and reduced operation times, enhancing productivity in semiconductor wafer processing systems without increasing contamination risks.

Implementation Method 1

at least one electrode disposed on the dielectric substrate, the at least one electrode being configured to produce an attractive force on a surface of the electrode to attract the payload

Methodology Applied

Scientific EffectElectrostatic attraction: Electrostatics

Data Source

PatentUS12441006B2Vacuum-environment robot with integrated payload gripper

Publication Date: 2025.10.14 PERSIMMON TECHNOLOGIES CORP

AI summary

An apparatus includes a drive; a movable arm connected to the drive and having a first link rotatable about the drive at a first rotary joint, a first actuator configured to cause a rotation of the first link about the first rotary joint, at least one second link connected to the first link at a second rotary joint, at least one second actuator configured to cause a rotation of the second link about the second rotary joint, and at least one gripper on the second link, the gripper being configured to carry a payload. The gripper includes a dielectric substrate, at least one electrode disposed on the dielectric substrate, the electrode being configured to produce an attractive force on a surface of the electrode to attract the payload, and a main electronic module configured to apply a voltage to the electrode from a source of current.