Vacuum Evaporation Device for OLED Blend Doping

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing OLED technologies face limitations in enhancing electron mobility due to the ligand in metal-ion containing complexes having no contribution to electron transport capability, restricting the enhancement of electron transport layers.

Innovation Solution

A vacuum evaporation device with co-evaporation of organic material and metal sources, where the organic material and metal evaporation sources are controlled to simultaneously evaporate and blend dope on a substrate, forming a uniform film layer, thereby enhancing electron mobility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If metal-ion containing complex is used for doping electron transport layer, then electron mobility is enhanced, but the ligand in the complex has no contribution to electron transport capability, restricting the enhancement

Engineering Contradiction:
Improveelectron transport capabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent separates the metal ion and organic ligand into independent evaporation sources. The organic ligand is evaporated first to form a base layer, then metal ions are evaporated separately to dope the layer. This segmentation allows each component to be optimized independently - the organic ligand can be selected purely for electron transport properties while the metal ions provide doping functionality, avoiding the restriction of pre-formed complexes where ligands don't contribute to electron transport.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If co-evaporation of organic material and metal sources is implemented, then uniform blending and precise evaporation rate control are achieved, but the device structure becomes more complex

Engineering Contradiction:
Improveevaporation rate controlVSAvoidevaporation source configuration
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs dynamic control of multiple evaporation sources with independent evaporation rate control. Each evaporation source (organic material source and metal source) can be independently adjusted and controlled during the evaporation process, allowing real-time optimization of the doping ratio and uniformity across the substrate. This dynamic control capability enables precise manufacturing even with multiple sources.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent combines multiple evaporation sources (organic material evaporation source and metal evaporation source) into a single vacuum evaporation device. By merging these sources in one device with coordinated control, the system achieves uniform blending of materials across the substrate while maintaining precise control over each material's evaporation rate, avoiding the need for separate processing steps.

Inventive Principle:
Principle #5Merging (Combining)

3Stability of the object's composition

If multiple evaporation sources are used for blend doping, then uniform film layer is formed, but the control difficulty increases

Engineering Contradiction:
Improvefilm layer uniformityVSAvoidevaporation control
Core Design Contradiction:
Stability of the object's compositionVSEase of operation

Solution Approach 1:

The patent implements feedback control mechanisms for the multiple evaporation sources. The system monitors the evaporation process and adjusts the evaporation rates of organic material and metal sources in real-time to maintain the desired doping ratio and film uniformity. This feedback control compensates for variations in material properties, vacuum conditions, and source-to-substrate distance, making the operation of multiple sources manageable and reproducible.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables precise control of evaporation rates and uniform blending of organic and metal materials, improving electron transport capabilities and overall performance of OLEDs.

Implementation Method 1

The at least one first organic material evaporation source and the at least one first metal evaporation source are controlled to perform evaporation simultaneously to generate blend doping

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

vacuum evaporation device comprises at least a first evaporation chamber. The first evaporation chamber includes at least one first organic material evaporation source and at least one first metal evaporation source

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS10170730B2Vacuum evaporation device and method thereof, and organic light-emitting display panel
Publication Date: 2019.01.01 WUHAN TIANMA MICRO ELECTRONICS CO LTD
  • US10170730B2 patent drawing
  • US10170730B2 patent drawing
  • US10170730B2 patent drawing

AI summary

A vacuum evaporation device, a vacuum evaporation method, and an organic light-emitting display panel are provided. The vacuum evaporation device comprises at least a first evaporation chamber. The first evaporation chamber includes at least one first organic material evaporation source and at least one first metal evaporation source. The at least one first organic material evaporation source is configured to evaporate a first organic material, and the at least one first metal evaporation source is configured to evaporate a first metal material. The at least one first organic material evaporation source and the at least one first metal evaporation source are controlled to perform evaporation simultaneously to generate blend doping of a first organic material and a first metal material on a substrate disposed within the first evaporation chamber.