Multi-Stage Vacuum Feedthrough for Rotating Chuck Seal Integrity

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Solution Overview

Problem

Existing vacuum feedthrough architectures for rotating chucks in semiconductor processing are prone to leaks due to the pressure differential across the boundary, with current solutions like elastomeric and ferrofluidic seals being unsuitable for high vacuum environments or chemically reactive.

Innovation Solution

A multi-stage dynamic vacuum feedthrough using concentric separators and a low-melting point sealing medium between adaptors, allowing for rotation of the chuck while maintaining sealed annular chambers for gases, liquids, and electrical conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional feedthrough architectures are used with rotating chucks, then the chuck can be rotated to improve process uniformity, but leakage of atmospheric gases into the vacuum chamber occurs due to the pressure differential boundary

Engineering Contradiction:

Improveprocess uniformityVSAvoidvacuum seal integrity

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The feedthrough architecture is segmented into multiple stages with multiple concentric separators creating distinct sealing zones. Each separator independently addresses the pressure differential at different radial positions, allowing the rotating chuck to maintain vacuum integrity while rotating to improve process uniformity.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple concentric separators are nested within each other, with each separator forming a seal at a different radial distance from the center. This nested arrangement allows the system to handle the pressure differential across the rotating boundary while maintaining multiple redundant sealing paths, preventing gas leakage into the vacuum chamber.

Inventive Principle:

Principle #7Nested doll (Nesting)

2Reliability

If elastomeric or ferrofluidic seals are used for rotating chucks, then sealing during rotation is achieved, but the seals are either chemically reactive or unsuitable for high vacuum environments

Engineering Contradiction:

Improvesealing performance during rotationVSAvoidchemical reactivity and vacuum compatibility

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A sealing medium acts as an intermediary substance between the stationary adapter and rotating adapter, filling the gaps created by rotation. This medium provides the necessary sealing function during rotation while being chemically inert and compatible with high vacuum environments, avoiding the reactivity issues of elastomeric seals and the vacuum incompatibility of ferrofluidic seals.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The sealing system utilizes changes in the physical state or properties of the sealing medium under different operating conditions. The medium maintains sealing effectiveness during rotation while preserving vacuum integrity, achieving reliable sealing without chemical reactivity through parameter optimization.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If multiple concentric separators are used to prevent leakage, then vacuum seal integrity is improved, but the device complexity increases

Engineering Contradiction:

Improveleakage protectionVSAvoidfeedthrough architecture complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The feedthrough is segmented into modular components with standardized concentric separators that can be manufactured independently and assembled systematically. This segmentation allows complex leakage protection to be achieved through repeated simple sealing units rather than a single complex sealing mechanism.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The concentric separators are arranged in a nested configuration where each separator fits within the radial space of the previous one. This nested design achieves multiple sealing functions within a compact radial footprint, reducing overall device complexity while maintaining robust leakage protection through multiple sealing stages.

Inventive Principle:

Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Provides effective leakage protection, low outgassing, and high chemical resistance, enabling seamless integration with existing processing tools and supporting rotating chucks without significant redesign.

Implementation Method 1

passing lines across the pressure differential boundary can create problems with leakage of atmospheric gasses into the vacuum chamber

Methodology Applied

Scientific EffectPressure differential: Pressure Gradient

Implementation Method 2

the first adapter, the second adapter, and the sealing medium define a plurality of annular chambers between the first adapter and the second adapter

Methodology Applied

Scientific EffectPressure gradient: Pressure Gradient

Data Source

PatentUS20260011535A1Multi-stage dynamic vacuum feedthrough

Publication Date: 2026.01.08 APPLIED MATERIALS INC

AI summary

Embodiments described herein relate to an apparatus that includes a first adapter that includes a plurality of first concentric separators, and a second adapter over the first adapter, where the second adapter includes a plurality of second concentric separators. In an embodiment, the second concentric separators are interleaved with the first concentric separators. In an embodiment, a sealing medium is provided between each of the plurality of first concentric separators, and the second concentric separators are inserted into a surface of the sealing medium.