Integrated Vacuum Mass Flow Control With Venturi Feedback
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Solution Overview
Problem
Current vacuum mass flow control systems for semiconductor equipment lack precision, real-time control, and monitoring capabilities, and are cumbersome, expensive, and difficult to maintain due to their manual adjustment and independent components.
Innovation Solution
A compact, integrated vacuum mass flow control apparatus comprising a housing with a first flow channel, a second flow channel, a venturi tube, a regulating valve, and sensors, where a controller adjusts the regulating valve's opening degree based on feedback from sensors to achieve precise and real-time control of vacuum mass flow rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual pressure regulating valve, switching valve, vacuum generator and mass flow sensor are combined to form a system, then vacuum mass flow control is achieved, but the system takes up a lot of space and is expensive to manufacture and install
Solution Approach 1:
The patent integrates multiple independent components (pressure regulating valve, switching valve, vacuum generator, and mass flow sensor) into a single integrated control device. This merging eliminates the need for separate pipelines and connections between components, thereby reducing installation space and simplifying the overall system structure while maintaining vacuum mass flow control functionality.
Solution Approach 2:
The integrated control device performs multiple functions simultaneously: pressure regulation, flow control, vacuum generation, and flow rate monitoring. By combining these functions into one device, the patent reduces the number of separate components needed, thereby reducing device complexity and installation requirements.
2Ease of operation
If manual adjustment is used to vary vacuum mass flow rate, then system operation is simple, but high regulation accuracy and real-time control are not achieved
Solution Approach 1:
The patent incorporates a mass flow sensor that provides real-time feedback on the actual flow rate to a controller. The controller compares the measured flow rate with the target flow rate and automatically adjusts the pressure regulating valve to maintain accurate flow control. This feedback mechanism enables both high regulation accuracy and real-time control while maintaining ease of operation through automated control.
Solution Approach 2:
The patent replaces manual mechanical adjustment with an automated electronic control system. The controller electronically adjusts the pressure regulating valve based on feedback from the mass flow sensor, eliminating the need for manual intervention while achieving high regulation accuracy and real-time control.
3Ease of repair
If various parts are independent and connected through pipelines, then each component can be maintained separately, but the system takes up a lot of space and is not conducive to arrangement
Solution Approach 1:
The patent integrates multiple components into a single compact housing, eliminating the need for external pipelines and reducing installation space. The integrated design maintains functional independence of each component while minimizing the overall footprint through careful spatial arrangement within the housing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables real-time and precise regulation of vacuum mass flow rates, reduces space and manufacturing costs, and simplifies maintenance by integrating components within a single housing, allowing for efficient and accurate control of vacuum flow.
Implementation Method 1
When a positive pressure fluid flowing out of the first terminating end flows through the venturi tube via the inlet end, it sucks a negative pressure fluid at the second terminating end into the venturi tube via the negative pressure suction port
Data Source
AI summary
A vacuum mass flow control apparatus and a control method thereof. The apparatus includes: a housing; a first flow channel disposed in the housing and having a first starting end and a first terminating end; a first sensor for collecting a signal of fluid in the first flow channel; a second flow channel disposed in the housing and having a second starting end and a second terminating end; a second sensor for collecting a vacuum flow rate in the second flow channel; a venturi tube having an inlet end, an outlet end and a negative pressure suction port; a regulating valve for regulating a flow-through cross-sectional area of the first flow channel; and a controller electrically connected to the regulating valve, the first sensor and the second sensor. The present disclosure improves structural integration, greatly reduces structural volume, and realizes real-time precise regulation in terms of control.