Vacuum Chamber Gas Flow Rate Calibration

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Solution Overview

Problem

Conventional calibration systems for fluid control equipment face challenges in accurately calculating gas flow rates due to pressure and temperature variations, convection, and water droplets, leading to inaccurate calibration.

Innovation Solution

A flow rate calculation system that places a container with enclosed gas on a weight measurement part within a decompression chamber, evacuating the chamber to prevent convection and water droplets, and using a shared flexible gas line to absorb vibrations and reduce errors, allowing accurate gas flow rate calculation without considering buoyancy influences.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If gas is consumed from the cylinder in atmospheric conditions, then the gas flow rate can be calculated based on weight variation, but convection and water droplets adhere to the cylinder surface causing measurement inaccuracies

Engineering Contradiction:
Improvegas flow rate measurement accuracyVSAvoidconvection and water droplet influence
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies vacuum environment (inert atmosphere principle) by placing the cylinder in a decompression chamber. This eliminates air molecules that cause convection and prevents water droplet adhesion, thereby removing the harmful factors while maintaining the weight-based flow rate measurement capability

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Device complexity

If the container is placed in atmospheric conditions for calibration, then the setup is simple, but buoyancy effects must be considered which reduces measurement accuracy

Engineering Contradiction:
Improvecalibration system setup simplicityVSAvoidweight measurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent uses vacuum environment to eliminate buoyancy effects from atmospheric gases. By placing the container in a decompression chamber, the measurement is performed in an environment without air molecules, thereby eliminating buoyancy influence while maintaining relatively simple calibration setup

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Ease of operation

If the container is removed from the decompression chamber for gas enclosure, then gas can be easily enclosed, but the chamber must be re-evacuated each time increasing calibration time

Engineering Contradiction:
Improvegas enclosure operationVSAvoidcalibration time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The patent applies nesting principle by placing the gas enclosure operation inside the vacuum environment. The container remains nested within the decompression chamber during gas enclosure, eliminating the need for repeated chamber evacuation and significantly reducing calibration time

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise calibration of fluid control equipment by eliminating convection and buoyancy effects, reducing calibration time and labor, and maintaining consistent vacuum conditions for improved accuracy.

Implementation Method 1

the container and the weight measurement part are placed in a decompressed decompression chamber

Methodology Applied
Scientific EffectVacuum: Vacuum

Implementation Method 2

a weight measurement part on which the container is disposed

Methodology Applied
Scientific EffectGravitation: Gravitation

Data Source

PatentUS10036662B2Flow rate calculation system and flow rate calculation method
Publication Date: 2018.07.31 HORIBA STEC CO LTD
  • US10036662B2 patent drawing
  • US10036662B2 patent drawing
  • US10036662B2 patent drawing

AI summary

To accurately calibrate fluid control equipment. A flow rate calculation system includes: a container in which gas is enclosed; a weight measurement part on which the container is disposed; a gas line which connects the container and fluid control equipment and in which the gas flows; and an enclosing line for enclosing the gas in the container disposed on the weight measurement part, thereby allowing the gas to flow from the container to the fluid control equipment or from the fluid control equipment to the container in a state that the container is disposed on the weighing measurement part, and calculating a flow rate of the gas flowing to the fluid control equipment based on an output value outputted from the weight measurement part, and the container and the weight measurement part are adapted to be placed in a decompressed decompression chamber.