Vacuum Gate Valve Gas-Line Switching for Leak-Tight Isolation
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Solution Overview
Problem
Existing gate valves in vacuum processing apparatuses face challenges in efficiently opening and closing chambers while minimizing gas leakage, especially during maintenance of the substrate processing and transfer modules.
Innovation Solution
A gate valve system with a drive mechanism utilizing multiple gas lines and switching valves to move and hold the valve element between opening and closing positions, using compressed air to control the movement and maintain the valve element at specific positions, thereby reducing gas leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single gas line is used to control the valve element movement, then the device complexity is reduced, but the reliability of spatial isolation deteriorates due to insufficient sealing pressure control
Solution Approach 1:
The gas supply system is segmented into multiple independent gas lines (first gas line for moving the valve element, second gas line for holding the valve element). This segmentation allows independent control of movement and holding functions, ensuring reliable spatial isolation while maintaining manageable device complexity through modular gas line design.
2Speed
If gas pressure is continuously supplied to move the valve element, then the opening/closing speed is improved, but the loss of gas increases
Solution Approach 1:
Gas pressure is supplied periodically rather than continuously - first gas pressure is supplied to move the valve element from closed to open position, then gas supply is stopped and second gas pressure is supplied to hold the valve element in the open position. This periodic action maintains fast response speed while significantly reducing gas consumption compared to continuous pressure supply.
3Adaptability or versatility
If maintenance is performed on substrate processing modules, then the adaptability of the system is improved, but gas leakage increases due to chamber opening
Solution Approach 1:
The gate valve structure is segmented with a valve element that can independently control the chamber opening. During maintenance of substrate processing modules, the valve element remains in the closed position controlled by the second gas line, segregating the vacuum chamber from the maintenance area and preventing gas leakage while allowing maintenance personnel to work on the modules.
Solution Approach 2:
The gate valve acts as an intermediary between the vacuum chamber and the external environment. By maintaining the valve element in a closed position using the second gas line during maintenance operations, it mediates between the need for module maintenance and the requirement to prevent gas leakage, allowing maintenance to proceed without compromising vacuum integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces gas leakage between the substrate processing and transfer modules, even during maintenance, by independently controlling the gas supply for the valve element's position, ensuring reliable spatial isolation and efficient operation.
Implementation Method 1
The drive moves the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line
Implementation Method 2
holds the valve element at the closing position by pressure of gas supplied from the second gas line
Data Source
AI summary
A gate valve opens and closes a first opening of a first chamber in a vacuum processing apparatus. The gate valve includes: a valve element configured to open and close the first opening; a drive configured to move the valve element so that the valve element takes at least a closing position, where the valve element closes the first opening, and an opening position, where the valve element opens the first opening; a first gas line and a second gas line; and a first switching valve that connects one of the first gas line and the second gas line to the drive. The drive moves the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line, and holds the valve element at the closing position by pressure of gas supplied from the second gas line.