Compact Vacuum Gate Valve for Stable Low-Particle Operation
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Solution Overview
Problem
Existing non-sliding vacuum gate valves for semiconductor manufacturing face issues with destabilization during high-speed movements, increased friction leading to particle contamination, and complex structures that compromise cleanliness and durability.
Innovation Solution
A vacuum gate valve design featuring a compact, thin structure with a piston rod mechanism, cam grooves, and elastic bushings to reduce friction and stabilize valve movements, incorporating a piston cushioning mechanism and movement guiding parts to minimize vibrations and impulsive sounds.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a cam mechanism is used to drive the valve body in existing non-sliding vacuum gate valves, then the valve can achieve opening and closing movements, but the structure becomes complex and friction increases leading to particle contamination
Solution Approach 1:
The patent extracts and eliminates the complex cam mechanism from the valve structure. Instead of using cam grooves and cam rollers, the invention employs a simplified direct driving mechanism where the drive shaft directly transfers motion to the valve body through basic mechanical linkages, removing the source of complexity and particle generation while maintaining the essential opening and closing functionality
Solution Approach 2:
Rather than using a cam mechanism to convert rotational motion into the required valve movement, the patent inverts the approach by using a direct rotational-to-rotational or rotational-to-linear transmission system. The drive shaft's rotation is directly transmitted to the valve body through simplified linkages, eliminating the need for complex motion conversion mechanisms
2Productivity
If high-speed valve movements are implemented to improve productivity, then output increases, but destabilization occurs during operation reducing reliability
Solution Approach 1:
The patent applies dynamic balancing principles to the valve drive mechanism. The simplified linkage system is designed to minimize inertial forces and vibrations during high-speed operation. The direct transmission path reduces mechanical play and instability, allowing the valve to achieve high-speed movements while maintaining operational stability and reliability
3Object-generated harmful factors
If friction is reduced to prevent particle contamination, then cleanliness improves, but valve movement control becomes less stable
Solution Approach 1:
The patent removes the cam mechanism that generates friction and particles. By eliminating cam grooves and cam rollers, the source of friction-induced particle contamination is extracted from the system. The simplified linkage mechanism that replaces it operates with minimal friction, preventing particle generation while maintaining adequate movement control through proper mechanical design
Solution Approach 2:
The patent replaces the high-friction cam mechanism with a low-friction mechanical linkage system. This substitution reduces contact friction and particle generation while maintaining the necessary valve movement control through optimized linkage geometry and bearing support
4Volume of moving object
If a compact design is implemented to integrate the apparatus, then space utilization improves, but the valve structure becomes more complex
Solution Approach 1:
The patent merges the drive mechanism and valve body into a more integrated compact unit. By eliminating the cam mechanism and using direct linkages, the drive shaft and valve body can be positioned closer together, reducing the overall apparatus volume. The simplified structure allows for better spatial integration while actually reducing complexity compared to separate cam mechanism components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves stable and reliable high-speed valve operations with reduced particle occurrence, minimized vibrations, and enhanced durability by optimizing the valve's structural simplicity and guiding mechanisms.
Implementation Method 1
a state in which a valve-body open/close driving body is elastically pushed by an elastic member arranged as appropriate in the valve toward one direction
Implementation Method 2
a driving mechanism for driving this member is integrated in a compact form... cam rollers provided on the left and right sides of the lever member are each locked at an upper end of a cam groove formed in a cam frame
Implementation Method 3
a rod arm ascends integrally with an ascent of a piston of an air cylinder
Data Source
AI summary
A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive sound and vibrations, and also having high durability. The vacuum gate valve includes housing bodies, a valve-body open/close driving body, and a stem provided with a valve body. Each of the housing bodies has therein a piston rod and a cam member with a cam groove. On each side of the valve-body open/close driving body, a cam roller and a fulcrum roller are provided. On an inner side of the housing body, a vertical movement guiding part and a stopper part are provided. A spring for causing the valve-body open/close driving body to ascend is provided between the valve-body open/close driving body and a fixed base part on a fixed side.