Vacuum Gauge Wall-Embedded Thermal Compensation for Accurate Sensing

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Solution Overview

Problem

Existing thermal conductivity vacuum gauges face inaccuracies and durability issues due to the placement of thermal compensation elements on exterior or interior surfaces, which are affected by ambient and process gases, leading to measurement inconsistencies and potential damage.

Innovation Solution

Enclose the thermal compensation element within the wall of the gauge assembly, providing increased contact area and protection, enhancing durability and accuracy by isolating it from external and internal environments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the thermal compensation element is placed on the exterior surface of the gauge assembly, then it can measure ambient temperature, but it is affected by environmental temperature and easily damaged

Engineering Contradiction:
Improvetemperature measurement accuracyVSAvoidelement durability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The thermal compensation element is nested within a cavity formed in the wall of the gauge assembly body. This nesting approach protects the element from external environmental damage while maintaining its ability to measure ambient temperature through thermal conduction via the wall material, thereby resolving the contradiction between measurement accuracy and durability.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If the thermal compensation element is placed on the interior surface of the gauge assembly, then it is protected from external damage, but it is affected by working gases and may be corroded

Engineering Contradiction:
Improveelement durabilityVSAvoidtemperature measurement accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The element is nested within a cavity in the wall rather than placed on the interior surface, providing protection from corrosive working gases while maintaining exposure to ambient temperature through the wall structure, thus resolving the contradiction between durability and measurement accuracy.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The wall material acts as an intermediary between the thermal compensation element and the external environment. The element measures temperature through thermal conduction via the wall, eliminating direct contact with both external environmental factors and internal working gases, thereby resolving the contradiction between protection and measurement accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If the thermal compensation element is enclosed within the wall of the gauge assembly, then it is protected from external and internal environments, but it requires increased contact area for accurate measurement

Engineering Contradiction:
Improveelement durabilityVSAvoidcontact area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The element is nested within a cavity in the wall, which provides protection while maintaining adequate thermal contact area through the wall structure. The cavity design ensures the element remains in sufficient thermal contact with the wall material for accurate temperature measurement while being protected from both external and internal environments.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The wall structure is designed with a cavity that provides localized thermal contact between the thermal compensation element and the wall material. This local quality enhancement ensures adequate thermal conduction area for accurate measurement while maintaining overall element protection, resolving the contradiction between durability and contact area requirements.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the durability and accuracy of gas pressure measurements by ensuring the thermal compensation element is less affected by external and internal factors, resulting in a more robust and reliable vacuum gauge assembly.

Implementation Method 1

The thermal compensation element is enclosed within the wall of the body... providing increased contact area and protection, enhancing durability and accuracy by isolating it from external and internal environments

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a heater element (usually in the form of a filament or wire) is placed in contact with the working gas in the vacuum system... As gas molecules collide with the heater element they will transfer (i.e., conduct) heat away from it

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP4248185B1Thermal conductivity vacuum gauge assembly
Publication Date: 2026.03.04 EDWARDS LTD
  • EP4248185B1 patent drawingFigure 1
  • EP4248185B1 patent drawingFigure 2A
  • EP4248185B1 patent drawingFigure 2B

AI summary

The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element is enclosed within the wall between the outer and inner facing wall surfaces. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.