Vacuum Robot Gripper with Active Edge Clamping for Substrate Handling
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Solution Overview
Problem
Conventional vacuum environment robotic manipulators in semiconductor manufacturing face limitations due to passive arm mechanisms, which restrict throughput performance due to substrate slippage and acceleration constraints, necessitating a solution for secure substrate handling and efficient movement.
Innovation Solution
A vacuum-compatible robot gripper system with an active edge-clamping mechanism, featuring a front support with hard stops, a movable contact element, a bias device, and actuators to securely grip and release substrates, allowing for accelerated motion without slippage, and utilizing torsional springs to store and release energy for efficient operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If passive friction-based substrate holding is used, then the robot structure remains simple, but substrate slippage occurs during acceleration limiting throughput performance
Solution Approach 1:
The patent replaces the passive friction-based mechanical holding system with an active magnetic field-based holding system. The end-effector incorporates a magnet assembly that generates a magnetic field to secure the substrate, eliminating reliance on friction alone. This allows the substrate to be held securely during high-acceleration movements, enabling higher throughput performance without slippage.
Solution Approach 2:
The patent changes the physical parameter of substrate holding from friction-dependent mechanical contact to magnetic field interaction. By introducing magnetic field strength as a controllable parameter, the system can dynamically adjust holding force to match acceleration demands, resolving the contradiction between grip stability and throughput performance.
2Reliability
If active components are added to the arm for improved substrate control, then substrate grip stability improves, but vacuum compatibility deteriorates due to out-gassing and heat removal difficulties
Solution Approach 1:
The patent extracts the active control components (magnet assembly and actuator) from the passive arm structure and concentrates them in the end-effector. The arm itself remains a passive mechanism suitable for vacuum environments, while the end-effector contains the active components needed for reliable substrate gripping. This separation allows vacuum compatibility to be maintained while achieving improved substrate control.
Solution Approach 2:
The end-effector acts as an intermediary between the passive vacuum-compatible arm and the substrate. It incorporates the active magnetic holding components while maintaining a design suitable for vacuum environments, mediating between the constraints of vacuum operation and the requirements for reliable substrate gripping during acceleration.
3Device complexity
If multiple discrete moves are used for substrate exchange, then the robot structure remains simple, but substrate exchange time increases reducing throughput
Solution Approach 1:
The patent merges the functions of substrate release and pickup into a single coordinated operation. By positioning the end-effector to simultaneously access both the processed substrate and the fresh substrate, and using the magnetic holding mechanism to securely maintain grip during the exchange, the system reduces the number of discrete moves required while maintaining structural simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The active gripper system enhances throughput performance by maintaining substrate grip during acceleration and deceleration, reducing the number of moves required for substrate exchange, thereby improving the efficiency of vacuum environment robots.
Implementation Method 1
a bias device movably coupled to the contact element... configured to passively bias the contact element in the grip position such that the contact element contacts an edge of the substrate to urge the substrate against the at least one hard stop
Implementation Method 2
utilizing torsional springs to store and release energy for efficient operation
Implementation Method 3
the arm(s) of the vacuum environment robotic manipulators are passive mechanisms and therefore typically hold the substrate subject to processing solely by the means of frictional forces between the substrate and the robot end-effector
Data Source
AI summary
A vacuum robot adapted to grip and transport a substrate. The robot includes a robot drive coupled to an arm and having an end-effector adapted to support the substrate. A robot gripper system includes a front support having at least one hard stop, a movable contact element coupled to the end-effector, a bias device and at least one actuator coupled to the end-effector configured to move the contact element between a release position and a grip position. The bias device is configured to passively bias the contact element in the grip position such that the contact element contacts an edge of the substrate to urge the substrate against the at least one hard stop to secure the substrate in the grip position and to passively bias the contact element in the release position such that the contact element is retained in the release position.