Vacuum Holding Mechanism with Elastic Gap Sealing

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Solution Overview

Problem

Conventional workpiece fixation methods struggle with proper suction due to gaps between the suction stage and the workpiece, especially when dealing with varying sizes, thicknesses, surface irregularities, and warpage, leading to inefficient vacuum suction.

Innovation Solution

A holding mechanism incorporating a suction section with an elastic seal member and a clamp mechanism, where the elastic seal member is positioned to be hidden by the workpiece and the clamp presses the workpiece against the seal member during suction, ensuring contact and preventing gaps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional vacuum suction is used without additional sealing, then the structure is simple, but gaps occur between the suction stage and workpiece causing improper suction

Engineering Contradiction:
Improvesuction reliabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

An elastic seal member is introduced as an intermediary element between the suction stage and the workpiece. This seal member fills the gap and ensures reliable vacuum suction by preventing air leakage, while maintaining relatively simple device structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The elastic seal member is made of flexible material that can deform to adapt to the workpiece surface. This flexibility allows the seal to maintain contact with the workpiece even when there are surface irregularities or warpage, ensuring reliable suction without complex rigid sealing structures.

Inventive Principle:
Principle #30Flexible shells and thin films

2Reliability

If the workpiece is pressed firmly against the suction stage, then suction is improved, but the workpiece may be damaged or deformed

Engineering Contradiction:
Improvesuction reliabilityVSAvoidworkpiece integrity
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The elastic seal member deforms to fill gaps and adapt to workpiece surface variations, providing effective sealing without requiring excessive clamping force that could damage the workpiece.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The elastic properties of the seal member allow it to change its physical state (deformation) to achieve sealing, rather than relying on high mechanical force that could harm the workpiece.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the clamp presses the workpiece to eliminate gaps, then suction is improved, but the clamp mechanism becomes more complex

Engineering Contradiction:
Improvesuction reliabilityVSAvoidclamp mechanism complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The elastic seal member serves as a mediator that passively fills gaps between the suction stage and workpiece, eliminating the need for complex active clamp mechanisms while ensuring reliable suction.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The elastic seal member automatically deforms and adapts to fill gaps when the workpiece is placed on the suction stage, providing self-sealing functionality without requiring additional actuation or complex control mechanisms.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration ensures reliable vacuum suction of various workpieces by eliminating gaps and enhancing the stability of the suction process.

Implementation Method 1

a suction section 21 having a suction surface 24 on which a workpiece W is to be vacuum-suctioned

Methodology Applied
Scientific EffectVacuum suction: Vacuum

Implementation Method 2

an elastic seal member 22 disposed around the suction surface 24

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 3

a clamp mechanism 40 that includes a clamp 41 that presses the workpiece W such that the workpiece W comes into contact with the elastic seal member 22

Methodology Applied
Scientific EffectMechanical force: Mechanical Force

Data Source

PatentUS20250242478A1Holding mechanism and exposure apparatus
Publication Date: 2025.07.31 USHIO INC
  • US20250242478A1 patent drawing
  • US20250242478A1 patent drawing
  • US20250242478A1 patent drawing

AI summary

A holding mechanism includes a suction section, an elastic seal member, and a clamp mechanism. The suction section has a suction surface on which a workpiece is to be vacuum-suctioned. The elastic seal member is disposed around the suction surface such that at least part of the elastic seal member is hidden by the workpiece in plan view when the suction surface is viewed from above. The clamp mechanism includes a clamp that presses the workpiece such that the workpiece comes into contact with the elastic seal member, and drives the clamp to press the workpiece when the workpiece is suctioned by the suction section.