Vacuum IR Sensor Emissivity Calibration for Substrate Temperature

Solution Overview

Problem

Temperature measurement in vacuum environments is challenging due to the lack of a conduction/convection medium, and conventional non-contact infrared sensors are emissivity-dependent, requiring manual calibrations for different substrate materials.

Innovation Solution

In-situ calibration of non-contact infrared sensors using a vacuum thermocouple to obtain accurate temperature measurements, eliminating the need for manual calibrations and enabling flexible processing of various substrates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual calibration using temperature stickers is performed for different substrate materials, then measurement precision is improved, but loss of time increases and productivity decreases

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidcalibration time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The system performs self-calibration by automatically comparing infrared sensor readings with thermocouple measurements and adjusting emissivity settings without requiring manual intervention with temperature stickers, thereby eliminating calibration time loss while maintaining measurement precision

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The system uses feedback from thermocouple measurements to automatically adjust and optimize infrared sensor emissivity settings for different substrate materials, enabling real-time calibration without manual intervention and preventing time loss associated with traditional calibration methods

Inventive Principle:

Principle #23Feedback

2Measurement precision

If manual calibration using temperature stickers is performed for different substrate materials, then measurement precision is improved, but productivity decreases

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidsubstrate processing throughput

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The system performs self-calibration by automatically comparing infrared sensor readings with thermocouple measurements and adjusting emissivity settings without requiring manual intervention with temperature stickers, thereby eliminating calibration time loss while maintaining measurement precision

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The system uses feedback from thermocouple measurements to automatically adjust and optimize infrared sensor emissivity settings for different substrate materials, enabling real-time calibration without manual intervention and preventing time loss associated with traditional calibration methods

Inventive Principle:

Principle #23Feedback

3Ease of operation

If non-contact infrared sensors are used for temperature measurement in vacuum, then ease of operation is improved, but measurement precision deteriorates due to emissivity dependence

Engineering Contradiction:

Improvetemperature measurement convenienceVSAvoidtemperature measurement accuracy

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The system dynamically changes the emissivity parameter of the infrared sensor based on substrate material identification and thermocouple feedback, allowing the sensor to maintain high measurement precision across different materials while preserving the ease of non-contact operation

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The system uses feedback from thermocouple measurements to automatically adjust and optimize infrared sensor emissivity settings for different substrate materials, enabling real-time calibration without manual intervention and preventing time loss associated with traditional calibration methods

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances efficiency and reduces costs by minimizing the time required for temperature measurement and eliminating the need for temperature stickers, while providing flexible substrate processing capabilities.

Implementation Method 1

non-contact infrared sensor

Methodology Applied

Scientific EffectInfrared radiation: Infrared Radiation

Implementation Method 2

vacuum thermocouple

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12518989B2In-situ calibration/optimization of emissivity settings in vacuum for temperature measurement

Publication Date: 2026.01.06 APPLIED MATERIALS INC

AI summary

Methods and apparatus for processing a substrate are provided herein. For example, a method for processing a substrate comprises performing a first vacuum processing procedure on a substrate, obtaining temperature measurements of the substrate from a vacuum thermocouple, obtaining temperature measurements of the substrate from a non-contact infrared sensor, calibrating the non-contact infrared sensor based on the temperature measurements from the vacuum thermocouple and the temperature measurements from the non-contact infrared sensor, and performing a second vacuum processing procedure on the substrate using the calibrated non-contact infrared sensor.