Vacuum Collapsible Liner Fluid Delivery System
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Solution Overview
Problem
Existing fluid delivery systems for semiconductor and microelectronic device fabrication face challenges such as contamination, gas permeation, and difficulty in controlling flow rates and concentrations of multi-component formulations, leading to inefficiencies and waste in the use of expensive and sensitive materials.
Innovation Solution
The use of vacuum-based and pressure-based systems with collapsible liners and multiple flow controllers to minimize contamination, control flow rates, and determine concentrations accurately, while maintaining the purity and stability of fluid materials through inert materials and gravimetric methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If pressure dispensing is used to dispense liquid from liner-based packages, then liquid can be forced through the dispensing assembly, but gas may permeate through the liner into the contained liquid causing bubble formation
Solution Approach 1:
A gas barrier liner is introduced as an intermediary layer between the pressurizable container and the liquid contents. This liner acts as a mediator that allows pressure transmission to dispense the liquid while blocking gas permeation, thereby preventing bubble formation in the dispensed liquid stream.
Solution Approach 2:
The liner is constructed as a composite material structure with specific gas barrier properties. The liner combines materials that provide both flexibility for collapse during dispensing and gas impermeability to prevent contamination, creating a multi-functional barrier structure.
2Productivity
If multiple feed materials are delivered to a single point of use, then consolidated flow can be achieved, but flow control precision may be compromised
Solution Approach 1:
The system segments the flow control function by providing individual flow controllers for each feed material line before consolidation. This allows precise independent control of each material's flow rate while still achieving consolidated delivery at the single point of use, maintaining both productivity and precision.
Solution Approach 2:
Flow sensors and controllers provide feedback mechanisms that monitor and adjust the flow rates of individual feed materials. This enables precise control of each material stream even when multiple materials are being delivered simultaneously to a single point of use.
3Ease of operation
If feed materials are exposed to environmental gases and contaminants, then accessibility is improved, but material purity and stability deteriorate
Solution Approach 1:
The system maintains feed materials in sealed containers that create an inert environment, protecting materials from environmental gases and contaminants. The containers can be pressurized with inert gas or maintained under vacuum to prevent contamination while allowing controlled dispensing when needed.
Solution Approach 2:
The harmful environmental factors (gases, contaminants, UV light, heat) are extracted or excluded from the material storage environment by using sealed containers. The materials are isolated from the external environment, and only the necessary function of dispensing is allowed to occur through controlled interfaces.
4Device complexity
If conventional packaging is used for multi-component formulations, then simplicity is maintained, but concentration control and waste prevention are compromised
Solution Approach 1:
The system uses dynamic flow control that can be adjusted in real-time to match the actual formulation requirements. Flow controllers can be programmed to deliver precise concentrations by dynamically adjusting individual material flow rates, preventing waste from over-delivery or incorrect mixing ratios.
Solution Approach 2:
The system enables precise control of formulation parameters (concentrations, ratios, flow rates) through electronic control of individual feed material streams. By changing the flow parameters of each component independently, the system can optimize material usage and prevent waste while maintaining packaging simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
These systems effectively minimize contamination, achieve precise control over fluid flow and concentration, and reduce waste by ensuring the purity and stability of fluid materials, enabling efficient and accurate delivery of complex formulations in various industrial processes.
Implementation Method 1
a vacuum source in selective fluid communication with said sealable volume and operative to depressurize said sealable volume
Implementation Method 2
a pressurization source in selective fluid communication with said sealable volume and operative to pressurize said sealable volume
Data Source
Figure 1A~1C
Figure 2~3
Figure 4
AI summary
Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel (220, 230) is subjected to filling by application of vacuum between the liner (224, 234) and overpack (222, 230). Multiple feed material flow controllers (321A-324A) of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materaisl supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.