Vacuum Chamber Measuring Case for In-Situ State Detection
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Solution Overview
Problem
Existing vacuum processing apparatuses face challenges in accurately measuring the state within the processing chamber without opening it to the atmosphere, as external measurements are less accurate and opening the chamber reduces productivity due to the need for temperature and moisture control adjustments, and transferring heavy measuring devices is impractical.
Innovation Solution
A measuring device with a case that attaches airtightly to a secondary gate of the processing chamber, equipped with a decompressing mechanism and a robot arm with a sensor to measure the chamber's state without exposing it to the atmosphere, allowing for high-accuracy measurements within the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the processing chamber is opened to the atmosphere for measurement, then measurement accuracy is improved, but productivity deteriorates due to temperature and moisture control adjustments required
Solution Approach 1:
The patent applies the inert atmosphere principle by creating a vacuum environment within the case that matches the processing chamber's vacuum state. The decompressing mechanism evacuates air from the case to create a vacuum, allowing the measuring mechanism to operate in an environment identical to the processing chamber without exposing the chamber to atmospheric pressure, thereby maintaining productivity while achieving accurate measurements
Solution Approach 2:
The case acts as an intermediary between the atmospheric environment and the vacuum processing chamber. By attaching the case to the second gate and evacuating it to vacuum, the measuring mechanism can be positioned close to the substrate without directly exposing the processing chamber to the atmosphere, serving as a mediating vacuum chamber that enables accurate measurement while preserving chamber integrity
2Measurement precision
If a measuring device is transferred into the processing chamber, then measurement accuracy is improved, but device complexity increases due to transfer system requirements
Solution Approach 1:
The patent applies segmentation by dividing the measurement system into a separate detachable case that can be independently evacuated and positioned. Instead of transferring a heavy measuring device into the chamber, the case with the measuring mechanism is attached to the second gate, allowing the measurement function to be separated from the main processing chamber while maintaining vacuum conditions
Solution Approach 2:
The case creates a local copy of the vacuum environment within the processing chamber. By evacuating the case to match the chamber's vacuum pressure, the measuring mechanism operates in a replicated vacuum condition without requiring physical transfer into the chamber, simplifying the system architecture while maintaining measurement accuracy
3Measurement precision
If the measuring mechanism is positioned close to the substrate, then measurement accuracy is improved, but the risk of contamination increases when opening the chamber
Solution Approach 1:
The patent maintains a vacuum (inert) atmosphere within the case to prevent contamination. By evacuating the case before positioning the measuring mechanism near the substrate, the patent eliminates atmospheric contaminants that would otherwise enter the processing chamber or substrate area during chamber opening, thus protecting the substrate while enabling close-proximity measurements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate measurement of the processing chamber's state without opening it to the atmosphere, reducing the need for transfer systems and maintaining productivity by allowing direct measurement within the vacuum environment.
Implementation Method 1
a decompressing mechanism configured to reduce a pressure in the case
Data Source
AI summary
A measuring device for a vacuum processing apparatus including a processing chamber having a first gate for loading and unloading a substrate and a second gate different from the first gate is provided. The measuring device includes a case having an opening that is sized to correspond to the second gate of the processing chamber and is airtightly attachable to the second gate, a decompressing mechanism configured to reduce a pressure in the case, and a measuring mechanism accommodated in the case and configured to measure a state in the processing chamber through the opening in a state where the pressure in the case is reduced by the decompressing mechanism.