Vacuum Module State Data Collection via Distributed Control
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Solution Overview
Problem
In vacuum processing apparatuses, the differing timing requirements for data transmission between connection modules lead to inconsistent state data sampling times, reducing data collection reliability, especially under network congestion.
Innovation Solution
A configuration where the transfer module control device and process module control device acquire and update state data independently and transmit it in a loop or chain, ensuring that state data is transmitted to the data collection device within specific intervals, allowing concurrent data acquisition and transmission, and using a history storage device to maintain data integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If data transmission is performed sequentially from one module to the next in a chain, then each module can transmit its state data, but the transmission timing differs significantly between the first and last response stations, causing sampling time differences that reduce data collection reliability under network congestion
Solution Approach 1:
The system segments the data transmission task by providing each module with its own control device that independently manages data acquisition and transmission. Each control device operates autonomously to transmit state data from its respective module, eliminating the sequential dependency that caused timing differences. This segmentation allows parallel transmission operations across multiple modules simultaneously.
Solution Approach 2:
Each module's control device performs preliminary actions by continuously acquiring and buffering state data locally before transmission is required. This preliminary data preparation ensures that when transmission occurs, the data is already ready, reducing transmission delays and synchronizing sampling times across modules even under network congestion conditions.
2Productivity
If the data collection server requires transmission by socket communication in accordance with the period of data collection, then state data can be collected from modules, but when the number of connection modules is increased, the timing difference of data transmission requirement to the first and last response station considerably increases
Solution Approach 1:
The centralized data collection architecture is segmented into distributed control devices at each module. Each control device independently manages data transmission from its module, eliminating the sequential processing bottleneck that occurs when a single server communicates with multiple modules in order. This allows simultaneous data collection from all modules regardless of network distance.
Solution Approach 2:
Each module's control device performs self-service by autonomously acquiring, preparing, and transmitting its own state data without requiring sequential commands from a central server. This self-service approach allows all modules to operate independently and transmit data simultaneously, maintaining consistent sampling timing even as the number of modules increases.
Data Source
AI summary
A control device of a transfer module and a process module in a vacuum processing apparatus collects state data from the modules. The control device has a state data set including data on the entire module, updates its own state data in the set of its own state data acquired at acquisition timing and transmits it to a data collection device at transmission timing. A plurality of control devices is connected in a loop or in a chain to the data collection device; a data transmission interval is shorter than a data collection interval, and entire transmission synchronization is set to be less than twice an interval of acquisition timing.