Vacuum Transfer Module Layout for Bottom Robot Access
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Solution Overview
Problem
Existing substrate processing systems do not provide efficient access and maintenance for units below vacuum transfer modules, limiting the ease of loading and unloading of transfer robots.
Innovation Solution
A substrate processing system with a vacuum transfer module that allows access from below, featuring a detachable transfer robot and a trolley that can move within the lower space, enabling easy loading and unloading of the transfer robot using a trolley with vertical and horizontal driving units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the vacuum transfer module is designed with a closed bottom surface, then structural integrity and vacuum sealing are improved, but access for maintenance and loading/unloading of transfer robots becomes difficult
Solution Approach 1:
The bottom surface of the vacuum transfer module is segmented into a removable panel section and a fixed section. The removable panel can be detached to provide access to the lower space for maintenance activities and robot loading/unloading, while the fixed section maintains the vacuum seal when the panel is in place.
Solution Approach 2:
The transfer robot is extracted from the vacuum chamber environment and placed on a trolley that operates in the lower space outside the vacuum chamber. This allows the robot to be loaded and unloaded without breaking the vacuum seal of the main chamber.
2Adaptability or versatility
If electric units are installed in the lower space, then functionality is improved, but interference with transfer robot operations and maintenance access is increased
Solution Approach 1:
The lower space is divided into functional zones: one area houses electric units while another area provides clear access pathways for robot loading/unloading and maintenance activities. This spatial differentiation allows both functionality and ease of operation to coexist.
Solution Approach 2:
A trolley serves as an intermediary platform that transports the transfer robot into the vacuum chamber. The trolley operates in the lower space where electric units are located, allowing robot operations without direct contact between the robot and electric units, thus reducing interference.
3Reliability
If the transfer robot is permanently fixed in the vacuum transfer module, then operational reliability is improved, but maintenance and replacement become difficult
Solution Approach 1:
The transfer robot system transitions from a fixed configuration to a dynamic, replaceable configuration. The robot can be detached and reattached as needed, allowing for easy maintenance, repair, or upgrade while maintaining operational reliability through consistent performance of the standardized interface.
Solution Approach 2:
The transfer robot is designed as a recoverable component that can be removed, maintained or replaced, and then reinstalled. This allows the robot to be serviced outside the vacuum chamber without disrupting the overall system, improving ease of repair while maintaining operational reliability.
Data Source
AI summary
Provided is a substrate processing system including: a vacuum transferer having a first side surface, a second side surface on a side opposite to the first side surface, and a bottom surface having an opening, the vacuum transferer having a distance from the opening to the first side surface larger than a distance from the opening to the second side surface, first substrate processors on a first side surface side, second substrate processors on a second side surface side, a lower space defined below the vacuum transferer, a transfer robot detachably attached to the vacuum transferer to close an opening and configured to be taken out from the opening into the lower space, a first rail attached to the first substrate processors to extend along a longitudinal direction in the lower space, and a second rail attached to the second substrate processors.