Vacuum Motor Encoder Thin-Wall Isolation for Clean Vacuum Robots

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Solution Overview

Problem

Existing vacuum robots face issues with the generation of impurity gases due to the heating of sealing materials used in the sealing process of sensor chambers, which is problematic in vacuum environments requiring clean conditions.

Innovation Solution

The design incorporates a vacuum motor with a non-magnetic bearing support member featuring a recess that isolates the magnetic sensor under atmospheric pressure from the disk under reduced pressure, eliminating the need for sealing materials and reducing impurity gas generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If sealing materials are used to seal the sensor chamber opening, then the sensor chamber can be sealed from the vacuum space, but impurity gases are generated due to heating of the sealing materials

Engineering Contradiction:
Improvesealing effectivenessVSAvoidimpurity gas generation
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The invention extracts and removes the sealing material from the system by providing an opening in the sensor chamber that remains open without any sealing material. The magnetic sensor is positioned to detect signals through this open passage, eliminating the source of impurity gas generation while maintaining functional separation between the sensor chamber and vacuum space.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention introduces a magnetic field as an intermediary that can pass through the open passage and atmospheric pressure diaphragm without requiring physical sealing. The magnetic field serves as the mediator that transmits information from the vacuum space to the sensor chamber through the opening, eliminating the need for material seals.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a transmission window is provided to close the opening of the sensor chamber, then the opening is sealed, but the structure becomes more complex and impurity gases may still be generated

Engineering Contradiction:
Improvesealing effectivenessVSAvoidsensor chamber structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention completely removes the transmission window and any closing structure from the sensor chamber opening. The opening remains open to allow magnetic field passage, and the magnetic sensor detects signals directly through this open configuration, simplifying the overall structure while eliminating sealing-related complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If the sensor chamber is separated from the vacuum space, then the sensor is protected from vacuum conditions, but the device size increases

Engineering Contradiction:
Improvesensor protectionVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The invention uses an atmospheric pressure diaphragm as a thin flexible barrier that separates the sensor chamber from the vacuum space while occupying minimal volume. The magnetic sensor is positioned on one side of this thin diaphragm, allowing magnetic field penetration while providing pressure separation, thus protecting the sensor without significantly increasing device size.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively prevents the generation of impurity gases, ensures accurate slit detection, and allows for a compact, efficient vacuum robot operation in clean environments by integrating the sensor unit within the bearing support member.

Implementation Method 1

The thin wall isolates a space where the magnetic sensor is disposed under an atmospheric pressure from a space where the disk is disposed under a reduced pressure lower than the atmospheric pressure

Methodology Applied
Scientific EffectPressure differential: Pressure Gradient

Implementation Method 2

a magnetic sensor disposed to face the disk in the axial direction via a thin wall of the bearing support member that is formed by the recess

Methodology Applied
Scientific EffectMagnetic field detection: Magnetic Field

Data Source

PatentUS11749553B2Vacuum robot, vacuum motor, and vacuum motor encoder
Publication Date: 2023.09.05 YASKAWA DENKI KK
  • US11749553B2 patent drawing
  • US11749553B2 patent drawing
  • US11749553B2 patent drawing

AI summary

A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.