Vacuum Nano-Object Transfer With Comb Holder Interface Control

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Solution Overview

Problem

Current methods for depositing nano-objects like carbon nanotubes face challenges such as contamination, structural degradation, and poor control over the interface with the substrate, leading to reduced reproducibility and integration quality.

Innovation Solution

A method and device utilizing a comb-like holder with optical control and vacuum environment for precise transfer of nano-objects, minimizing contact areas and maintaining pristine conditions, allowing for systematic and controlled deposition with electrical measurement and cutting capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If mechanical transfer method is used to deposit nano-objects, then contamination and structural degradation are avoided, but transfer systematicity and interface control are poor

Engineering Contradiction:
Improvenano-object purity and structural integrityVSAvoidinterface control and transfer systematicity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent introduces a holder with comb-like teeth as an intermediary structure. The nano-objects are suspended between the teeth during transfer, allowing precise positioning and controlled interface formation with the substrate while maintaining mechanical support and minimizing direct contact contamination.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The holder is segmented into multiple comb-like teeth, each capable of carrying individual nano-objects. This segmentation allows systematic transfer of multiple nano-objects with precise spatial control, improving both transfer systematicity and interface control while maintaining the benefits of mechanical transfer.

Inventive Principle:
Principle #1Segmentation

2Productivity

If conventional deposition methods are used, then manufacturing speed is high, but nano-object quality and crystallinity are degraded

Engineering Contradiction:
Improvedeposition speedVSAvoidnano-object crystallinity and quality
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The nano-objects are grown and suspended on the holder teeth in advance, before the final transfer to the substrate. This preliminary preparation allows quality control and selection during the growth phase, while the subsequent transfer maintains this quality by avoiding degradation from conventional deposition methods.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If holder contact area with substrate is increased, then transfer stability is improved, but contamination and interface quality are degraded

Engineering Contradiction:
Improvetransfer stabilityVSAvoidcontamination and interface quality
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The holder design creates localized contact points at the tooth tips rather than broad surface contact. This local quality approach provides sufficient transfer stability through precise point contact while minimizing the contact area that could cause contamination or degrade interface quality with the substrate.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in cleaner, more reproducible, and stable nano-object integration with improved control over the interface, maintaining the nanotube's crystallinity and enhancing the success rate of the transfer process.

Implementation Method 1

The transfer step is preferably carried out when the inside of the enclosure is under vacuum at a pressure less than 10−6 bar

Methodology Applied
Scientific EffectVacuum: Vacuum

Data Source

PatentUS11854801B2Method and device for depositing a nano-object
Publication Date: 2023.12.26 UNIV DE PARIS
  • US11854801B2 patent drawing
  • US11854801B2 patent drawing
  • US11854801B2 patent drawing

AI summary

A method for depositing an object, including: —approaching, in an enclosure, a holder in the direction of a carrier substrate, then—transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10−6 bar.