Vacuum Orientation Chamber for Vertical OLED Evaporation
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Solution Overview
Problem
Existing substrate processing systems for OLED manufacturing face challenges in efficiently processing large area substrates in a vertical orientation, leading to increased footprint and contamination risks due to mask and carrier return paths.
Innovation Solution
A vacuum orientation module with a first vacuum orientation chamber featuring a transportation track and an orientation actuator to change substrate orientation from non-vertical to non-horizontal, integrated with a glass handling module to reduce system footprint and minimize exposure to atmospheric conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If substrates are processed in a horizontal orientation with mask return paths, then the processing can be completed, but the system footprint increases and contamination risks increase
Solution Approach 1:
The patent transitions from horizontal substrate processing to vertical substrate processing. Substrates are transported and processed in a vertical orientation within the vacuum chamber, eliminating the need for horizontal mask return paths and carrier return paths that extend the system footprint. This dimensional change allows masks and carriers to remain suspended in the vacuum chamber without requiring external return paths.
Solution Approach 2:
The patent maintains masks and carriers under vacuum conditions throughout the processing cycle. By keeping these components in the vacuum environment rather than allowing them to return through atmospheric paths, contamination from atmospheric exposure is eliminated. The vacuum atmosphere serves as a protective environment that prevents contamination of masks and carriers.
2Object-affected harmful factors
If masks and carriers are exposed to atmospheric conditions for return paths, then system complexity is reduced, but contamination increases
Solution Approach 1:
The patent merges the mask handling and carrier handling functions within the vacuum chamber. Both masks and carriers are suspended and manipulated within the same vacuum environment, eliminating separate atmospheric return paths. This consolidation reduces contamination interfaces while the vacuum system manages both components simultaneously.
Solution Approach 2:
The vacuum chamber acts as an intermediary environment that accommodates both mask and carrier operations. By providing a common vacuum space with appropriate suspension and positioning mechanisms, the system eliminates the need for atmospheric exposure during transitions, reducing contamination while managing system complexity through unified vacuum control.
3Area of stationary object
If vertical substrate orientation is implemented, then footprint is reduced, but new handling mechanisms are required
Solution Approach 1:
The patent replaces traditional mechanical substrate handling mechanisms with a suspension-based system using magnetic fields or electrostatic fields. Substrates, masks, and carriers are suspended without physical contact during vertical processing, eliminating complex mechanical grippers, clamps, and transfer mechanisms that would be required for vertical handling.
Solution Approach 2:
The patent changes the fundamental processing parameter from horizontal to vertical orientation. This parameter change enables compact footprint while the suspension mechanism adapts to the vertical configuration, using field-based forces rather than gravity-dependent mechanical systems to maintain and manipulate components in the vertical dimension.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces the footprint of the substrate processing system by approximately 50%, minimizes contamination by keeping masks and carriers under vacuum, and enhances processing efficiency by allowing vertical substrate orientation and simultaneous operation of multiple vacuum orientation chambers.
Implementation Method 1
A vacuum orientation module with a first vacuum orientation chamber featuring a transportation track and an orientation actuator to change substrate orientation from non-vertical to non-horizontal
Implementation Method 2
A process to manufacture OLED displays includes thermal evaporation of organic materials and deposition of organic materials on a substrate in a high vacuum
Implementation Method 3
deposition of organic materials on a substrate in a high vacuum
Data Source
AI summary
A vacuum orientation module for a substrate processing system is described. The module includes at least a first vacuum orientation chamber, comprising: a vacuum chamber; a transportation track within the vacuum chamber, the transportation track having a support structure and a driving structure and defining a transportation direction; and an orientation actuator to change the substrate orientation between a non-vertical orientation and a non-horizontal orientation, the vacuum chamber has two slit openings, particularly two essentially vertically slit openings, at opposing side walls of the vacuum chamber in the transportation direction.