Miniaturized Vacuum Package with Embedded Routing

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Solution Overview

Problem

Surface ion trap detectors face challenges in maximizing signal coupling while minimizing size, particularly in achieving efficient electrical and optical signal transfer within a controlled vacuum environment, which is essential for applications in dynamic environments like battlefields or satellite platforms.

Innovation Solution

An integrated package with embedded electrical and optical routing circuits and a vacuum vessel that forms a chamber above the active area, allowing for simplified bonding and hermetic sealing, thereby providing controlled access to the active area without breaking the vacuum environment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the vacuum vessel is bonded directly to the substrate with exposed routing circuits, then bonding complexity increases, but signal coupling efficiency improves

Engineering Contradiction:
Improvesignal coupling efficiencyVSAvoidbonding complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The electrical and optical routing circuits are embedded within the substrate rather than being exposed on the surface. This merging of the circuits into the substrate structure simplifies the bonding process between the vacuum vessel and substrate, while maintaining efficient signal coupling to the active area through the integrated routing paths.

Inventive Principle:
Principle #5Merging (Combining)

2Volume of moving object

If the package size is minimized for dynamic applications, then SWaP performance improves, but signal collection efficiency deteriorates

Engineering Contradiction:
Improvepackage sizeVSAvoidsignal collection efficiency
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The routing circuits are arranged in a three-dimensional configuration within the substrate, utilizing vertical and lateral pathways to route signals from the active area to external connections. This dimensional optimization allows compact packaging while maintaining adequate signal collection efficiency through optimized path lengths and coupling geometries.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Manufacturing precision

If the active area is isolated from bonding material during sealing, then manufacturing precision improves, but device complexity increases

Engineering Contradiction:
Improvebonding material isolationVSAvoidstructural complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The substrate surface is segmented into distinct functional regions: an active area for sensing/detection, a routing circuit region with embedded circuits, and a peripheral bonding region. This segmentation allows bonding material to be confined to specific areas away from the active area, preventing contamination while maintaining manufacturing simplicity through clear zone definition.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances signal collection efficiency, reduces mechanical constraints, and maintains ultra-high vacuum performance, making it suitable for miniaturized, dynamic applications by integrating the vacuum vessel with the active area, thus improving size, weight, and power (SWaP) performance.

Implementation Method 1

maintains ultra-high vacuum performance

Methodology Applied
Scientific EffectVacuum: Vacuum

Data Source

PatentUS11551921B1Miniaturized vacuum package and methods of making same
Publication Date: 2023.01.10 NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLC
  • US11551921B1 patent drawing
  • US11551921B1 patent drawing
  • US11551921B1 patent drawing

AI summary

The present disclosure relates to an integrated package having an active area, an electrical routing circuit, an optical routing circuit, and a vacuum vessel. Methods of making such a package are also described herein.