Vacuum Stage Pad Alignment Jig for Accurate Hole Positioning
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Solution Overview
Problem
The installation of elastic pads on vacuum suction holding stages is challenging due to the need for precise alignment of vacuum holes on the stage with corresponding holes on the pad, which can be misaligned during replacement, reducing adhesive force and affecting vacuum suction effectiveness.
Innovation Solution
A jig with first and second projecting portions is used to align and secure the elastic pad on the stage, ensuring proper positioning of vacuum holes and adhesive contact, facilitating easy installation and maintaining suction efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual alignment method is used, then installation flexibility is maintained, but alignment precision deteriorates
Solution Approach 1:
The patent introduces a positioning jig as an intermediary tool between the elastic pad and the stage. The jig contains positioning protrusions that fit into corresponding positioning recesses on the stage, and guide grooves that guide the elastic pad during installation. This intermediary device ensures precise alignment without requiring high skill from the installer, resolving the contradiction between alignment precision and installation complexity.
2Reliability
If elastic pad is re-installed after offset, then adhesive force is reduced, but alignment capability varies among workers
Solution Approach 1:
The patent implements preliminary alignment action by providing positioning protrusions and guide grooves before the actual adhesive bonding occurs. The positioning structure pre-establishes the correct position and orientation of the elastic pad relative to the stage, ensuring that even if the pad is removed and reinstalled, the alignment remains consistent and adhesive force is maintained. This eliminates variability among different workers.
3Reliability
If vacuum holes and pad holes are misaligned, then vacuum suction effectiveness deteriorates, but manual installation allows variability
Solution Approach 1:
The positioning jig acts as an intermediary that transfers the precise positioning information from the stage (through positioning protrusions fitting into recesses) to the elastic pad (through guide grooves). This ensures that the holes in the elastic pad align perfectly with the vacuum holes on the stage, maintaining vacuum suction effectiveness while eliminating installation variability among different workers.
Data Source
AI summary
A vacuum hole for suction holding a processing target object through vacuum is formed on a stage surface of a vacuum suction holding stage, and a hole corresponding to the vacuum hole is formed on an elastic pad. A jig includes a first projecting portion configured to be insertable into the vacuum hole on the vacuum suction holding stage, a support portion configured to come into contact with the stage surface with the first projecting portion inserted in the vacuum hole, and a second projecting portion projecting toward an opposite side to the first projecting portion with respect to the support portion and configured to be insertable into the hole on the elastic pad.