Vacuum Pad Attachment for Edge Ring Cooling

The patent replaces the manual mechanical attachment process with an automated attachment device that uses a vacuum chamber and driving mechanism. The device automatically positions the cooling pad against the edge ring and applies uniform pressure through a pressing member, eliminating the air bubble formation issue that plagues manual attachment while maintaining operational simplicity through automation.

The patent employs a vacuum atmosphere within the attachment chamber to prevent air bubbles from forming during the attachment process. By removing air from the chamber before attachment, the environment becomes inert to bubble formation, ensuring high-quality attachment without the defects associated with manual attachment in atmospheric conditions.

The attachment device is segmented into distinct functional modules: a vacuum chamber for bubble prevention, a driving mechanism for positioning, a pressing member for application, and a support structure. This segmentation allows each component to perform its specific function efficiently while making the overall system easier to understand, maintain, and manufacture despite the increased automation.

The device incorporates self-aligning features where the cooling pad and edge ring automatically position themselves relative to each other through guide structures and fixed geometric relationships. This self-service capability reduces the need for complex control systems and manual adjustment mechanisms, thereby improving attachment quality without proportionally increasing device complexity.

The vacuum atmosphere is created before the attachment process begins, and the chamber is sealed to maintain this condition throughout the attachment operation. This preliminary action ensures bubble-free attachment without requiring continuous vacuum pumping during the attachment itself, thereby reducing overall energy consumption while achieving the desired attachment quality.

The vacuum pump operates at full capacity only during the brief period needed to evacuate the chamber before attachment. Once the vacuum is established, the pump can be reduced to maintenance mode or shut off completely if the chamber remains sealed during attachment. This partial action approach provides more than enough vacuum for bubble prevention during the critical attachment moment while minimizing energy consumption during non-critical periods.