Consumable Part Transfer Handler for Vacuum Tool Changeover
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Solution Overview
Problem
The existing process of replacing consumable parts in processing devices is inefficient due to the need to open the processing device to the atmosphere, leading to longer processing stop times and manual handling of large parts, which is labor-intensive and time-consuming.
Innovation Solution
A part transporting device equipped with a robot arm and a moving mechanism that allows for the automated transfer of consumable parts between a processing device and a replacement station, minimizing exposure to the atmosphere and reducing manual handling by using a container with a gate valve and a power source for movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual extraction and mounting of consumable parts is performed, then the replacement process can be completed, but the processing stop time period becomes longer and labor intensity increases
Solution Approach 1:
The replacement handler automatically performs the extraction and mounting of consumable parts without human intervention. The handler includes a robot arm that can grasp and transfer parts, and an end effector that interfaces with the consumable parts for automatic replacement, enabling the system to service itself
Solution Approach 2:
Manual mechanical operations are replaced with an automated replacement handler that uses a robot arm and end effector mechanism. The handler automatically grasps consumable parts, transfers them between containers, and mounts them, substituting human manual labor with automated mechanical systems
2Ease of operation
If the processing device is opened to the atmosphere for part replacement, then manual extraction is possible, but evacuation time increases and processing efficiency decreases
Solution Approach 1:
A replacement handler serves as an intermediary device between the processing device and the operator. The handler can operate within the vacuum environment of the processing device, transferring consumable parts without requiring the entire system to be opened to atmospheric pressure, thus maintaining vacuum integrity while enabling part replacement
Solution Approach 2:
The replacement handler operates within the vacuum (inert) atmosphere of the processing device. By maintaining the vacuum environment during automated part replacement, the system avoids the need to evacuate and re-evacuate the chamber, significantly reducing processing stop time while keeping parts accessible through the automated mechanism
Data Source
AI summary
A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.