Vacuum-Compatible Consumable Part Replacement for Processing Tools
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Solution Overview
Problem
The existing process of replacing consumable parts in processing devices requires opening the device to the atmosphere, leading to increased processing stop time and potential inefficiencies due to manual handling of large-sized parts, which can prolong the processing stop time and increase the installation area of the manufacturing system.
Innovation Solution
A system comprising a part storage device and a replacement device that moves to the processing device to replace consumable parts without opening the device to the atmosphere, using robotic mechanisms to facilitate quick and efficient replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual replacement of large-sized consumable parts is performed by opening the processing device to the atmosphere, then the consumable part can be replaced, but the processing stop time increases and the installation area increases
Solution Approach 1:
A replacement device is introduced as an intermediary between the processing device and the operator. This replacement device includes a holder for grasping the consumable part and a robot arm for automated manipulation, enabling replacement operations without direct manual handling inside the processing chamber, thus reducing processing stop time while maintaining ease of operation
Solution Approach 2:
The manual mechanical operation of removing and installing large consumable parts is replaced with an automated robotic system. The robot arm performs the replacement operations automatically, eliminating the need for operators to manually handle large parts, thereby reducing processing stop time and improving operational efficiency
2Ease of operation
If manual replacement of large-sized consumable parts is performed, then the consumable part can be replaced, but the installation area of the system increases
Solution Approach 1:
The replacement device is designed with multi-functionality, serving both as a holder for consumable parts and as an automated robotic manipulation system. This integration allows the same device to perform multiple functions (holding, grasping, and replacing consumable parts), reducing the need for separate equipment and thereby minimizing the installation area while maintaining ease of operation
3Ease of operation
If the processing device is opened to the atmosphere for consumable part replacement, then the consumable part can be replaced, but vacuum evacuation is required afterward, increasing processing stop time
Solution Approach 1:
The replacement device acts as an intermediary that enables consumable part replacement through a sealed interface with the processing device. This intermediary system includes a holder and robot arm that can perform replacement operations without requiring the processing chamber to be opened to the atmosphere, thereby eliminating the need for subsequent vacuum evacuation and reducing processing stop time while maintaining ease of operation
Data Source
AI summary
A part replacement system includes a part storage device configured to store an unused consumable part, and a replacement device that is connected to a processing device and the part storage device, the replacement device being configured to replace a used consumable part installed in the processing device with the unused consumable part stored in the part storage device. The replacement device is moved to a position of the processing device having the used consumable part that requires replacement, and the replacement device is connected to the processing device, and the part storage device is moved to a position of the replacement device connected to the processing device having the used consumable part that requires replacement, and the part storage device is connected to the replacement device.