Vacuum Particle Jet Characterization Device
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Solution Overview
Problem
Current techniques, such as LIBS and LIBD, are limited in characterizing particles smaller than 100 nm in size and do not provide effective density profile characterization of particles in a jet under vacuum, which is crucial for precise deposition on substrates.
Innovation Solution
A device comprising an optical system with a laser beam, optical fiber, and detection devices for photon and ion/electron detection, allowing for the generation of a plasma in a focal volume to analyze particles, enabling chemical composition and density profile determination of particles as small as 5 nm, and providing 1D, 2D, or 3D density maps of particles in a jet.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If LIBS technique is used to characterize particles in ambient gas, then chemical composition can be determined, but the intense plasma emission limits detection of particles smaller than 100nm
Solution Approach 1:
The patent extracts the particle detection function from the bulk plasma analysis by using a tightly focused laser beam that interacts with individual particles or small clusters, separating the detection of single particles from the collective plasma emission that obscures smaller particles in conventional LIBS
Solution Approach 2:
The patent applies local quality by creating a highly localized interaction region through tight laser focusing, where the laser intensity is concentrated enough to ablate individual nanoparticles but the volume is small enough to avoid overwhelming plasma emission from bulk material, enabling detection of particles down to 20nm
2Measurement precision
If LIBD technique is used to detect nanoparticles, then detection sensitivity improves for particles smaller than 20nm, but chemical composition information is lost
Solution Approach 1:
The patent merges the advantages of both LIBS and LIBD techniques by using laser-induced breakdown detection to identify nanoparticle presence with simultaneous collection of spectral emission lines for chemical composition analysis, achieving both high sensitivity and compositional information
3Measurement precision
If conventional LIBS or LIBD techniques are used, then particle characterization is possible, but density profile determination within the jet is not achievable
Solution Approach 1:
The patent applies dynamics by translating the focused laser beam and detection system through the particle jet along with the particle flow, enabling spatially resolved measurements at different positions within the jet to construct density profiles rather than measuring a fixed location
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the characterization of particles down to 5 nm in size and provides detailed density profiles, enhancing the control and precision of particle deposition on substrates by accurately determining the chemical composition and distribution of particles in a jet.
Implementation Method 1
focusing a pulsed laser beam into the solution. The laser intensity at the focal plane is adjusted so that nothing happens in the absence of a particle. Conversely, if a particle is present at the focal point, the laser-particle interaction produces a plasma that can be detected
Implementation Method 2
The light emitted by the plasma is analyzed to obtain information about the chemical composition of the particle and the surrounding medium
Data Source
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AI summary
The invention relates to a device (100) for characterizing particles evolving under vacuum in a particle jet, characterized in that it comprises: - a system (110) for generating a particle jet in a chamber (120) to which is associated a pumping means (121) of the fluid present in the chamber in order to establish a vacuum in this chamber; - a laser (30) emitting a laser beam in the form of pulses whose characteristics are controlled by a control means (27), laser to which is associated an optical device (60) arranged to focus said beam in the chamber (120), perpendicular to the direction of propagation of the particle jet to create, in a focal volume (50) comprising at most one particle of the jet, a plasma by the interaction between the laser beam and this particle of the jet, said plasma emitting other particles, characteristic of the interaction between the laser and the particles of the jet;- at least one detection device (61, 62) arranged to detect particles emitted by the plasma and associated with a means for acquiring and processing data (28) from the detection of said particles emitted by the plasma.;