Vacuum Partition Wall Curvature and Ribs for Motor Efficiency
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Solution Overview
Problem
The existing vacuum processing apparatuses face a challenge in reducing the thickness of the vacuum partition wall while maintaining its strength, which affects the efficiency of the motor due to increased differential pressure loads.
Innovation Solution
The substrate conveyer system incorporates a vacuum partition wall with a curved or elliptical cross-sectional shape and deformation preventive ribs, which reduces the thickness and stress on the partition wall, allowing for a shorter distance between the permanent magnet and the driving magnet, thereby enhancing motor efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the thickness of the vacuum partition wall is reduced to improve motor efficiency, then the distance between the permanent magnet and the driving magnet can be shortened, but the strength and bending resistance of the partition wall decreases
Solution Approach 1:
The vacuum partition wall is designed with a curved surface instead of a flat surface. This curvature allows the wall to better distribute and resist the differential pressure loads from the vacuum environment, enabling the use of thinner material while maintaining structural strength and preventing bending deformation.
Solution Approach 2:
The partition wall is constructed using a composite structure combining a ceramic plate (for vacuum sealing and electrical insulation) with a metal reinforcement plate (for mechanical strength). This composite design allows the thin ceramic layer to provide the necessary vacuum barrier while the metal plate ensures structural integrity and bending resistance.
2Power
If the thickness of the vacuum partition wall is reduced, then motor efficiency improves, but the reliability of the vacuum seal and structural integrity deteriorates
Solution Approach 1:
The partition wall uses a composite structure where a ceramic plate provides vacuum sealing and electrical insulation properties, while a metal reinforcement plate provides mechanical strength. This combination ensures that even with reduced thickness, the vacuum seal remains reliable and the structure maintains structural integrity.
Solution Approach 2:
The curved surface design of the partition wall improves its ability to withstand differential pressure loads, reducing stress concentration and preventing deformation that could compromise the vacuum seal. The curvature distributes loads more evenly across the structure.
3Ease of manufacture
If the thickness of the vacuum partition wall is reduced, then manufacturing cost decreases, but the ability to withstand differential pressure loads decreases
Solution Approach 1:
The curved surface design allows the partition wall to better withstand differential pressure loads by distributing stresses more evenly across the structure. This curvature enables the use of thinner material while maintaining the ability to resist vacuum pressure, thereby reducing manufacturing cost without sacrificing pressure resistance.
Solution Approach 2:
The composite structure combines ceramic and metal materials to achieve both vacuum sealing and mechanical strength in a thin configuration. This allows the partition wall to be made thinner (reducing cost) while still maintaining the ability to withstand differential pressure loads.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces the thickness of the vacuum partition wall, improving motor efficiency and allowing for a more compact and cost-effective design by distributing the load effectively and reducing bending, thus enhancing the overall performance of the vacuum processing apparatus.
Implementation Method 1
A substrate conveyer is configured to form magnetic coupling between the portion magnetized in a spiral pattern, and the permanent magnet of the carrier, thereby moving the carrier with rotation of the magnetic screw
Implementation Method 2
a vacuum partition wall which is provided between the permanent magnet and the driving magnet, and configured to maintain, in a vacuum atmosphere, a space in which the permanent magnet is arranged
Data Source
AI summary
An apparatus includes a chamber configured to form a reduced-pressure space, a carrier which holds a substrate, and a conveyer which conveys the carrier in the chamber. The chamber includes a side wall including an opening portion, and a partition wall arranged in the opening portion, the conveyer includes a permanent magnet provided on the carrier, and a driving magnet arranged outside the partition wall so as to drive the carrier, and the partition wall includes a first portion arranged between the driving magnet and a path through which the carrier passes, and a second portion arranged to connect the first portion to the side wall, the first portion having a smooth surface in a portion in which the first portion faces the path, and the first portion including a plurality of ribs arranged on a surface thereof on a side on which the driving magnet is arranged.