Vacuum Pipe Support Structure With Inertial Vibration Damping

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Solution Overview

Problem

Existing vacuum pipe support devices in semiconductor and display device environments suffer from vibration-induced fatigue, noise, and leakage issues due to continuous operation, leading to instability and potential damage, as well as diffusion of pollutants and heat loss through the support structure.

Innovation Solution

A support device for vacuum pipes featuring a housing with a vibration prevention member that includes a support member and a buffer member with a mass in a sealed space to dampen vibrations, and a press member to enhance contact with the vacuum pipe, reducing vibrations and noise while preventing pollutant diffusion and heat loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If a vacuum pipe is continuously operated in a multilayered structure with bolts for coupling, then the vacuum environment can be maintained, but vibration causes fatigue loads that loosen bolts and cause deformation and damage

Engineering Contradiction:

Improvecontinuous operation durationVSAvoidcoupling stability

Core Design Contradiction:

Duration of action of stationary objectVSReliability

Solution Approach 1:

The patent applies beforehand cushioning by introducing a vibration prevention member with elastic properties into the coupling structure between the vacuum pipe and support device. This elastic body is positioned in advance to absorb and dampen vibrations before they can cause fatigue damage to bolts or deformation to the coupling structure, thereby maintaining reliability during continuous operation

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent changes the physical parameters of the coupling structure by replacing rigid bolt-only connections with a combination of bolts and an elastic vibration prevention member. This introduces damping characteristics and flexibility to the system, allowing it to withstand continuous vibration without losing coupling stability

Inventive Principle:

Principle #35Parameter changes

2Strength

If a washer and elastic deformable body are added to the cover plate to prevent damage, then some protection is provided, but vibration of the vacuum pipe and support device is not effectively reduced

Engineering Contradiction:

Improvecoupling strengthVSAvoidvibration

Core Design Contradiction:

StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a dedicated vibration prevention member as an intermediary element between the vacuum pipe and the support device. This intermediate component specifically targets vibration reduction while maintaining coupling strength, separating the functions of structural support and vibration damping more effectively than combining washer and elastic body functions

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of operation

If the support device structure allows vacuum pipe penetration, then the vacuum pipe can be supported through layers, but pollutants diffuse and heat is lost through the coupling part and inner space

Engineering Contradiction:

Improveinstallation easeVSAvoidheat loss

Core Design Contradiction:

Ease of operationVSLoss of energy

Solution Approach 1:

The patent employs sealing structures including gaskets or sealing films at the coupling interface between the support device and vacuum pipe. These flexible sealing elements prevent pollutant diffusion and heat loss through the penetration opening while maintaining the ease of installation through modular coupling design

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The patent converts the potentially harmful open penetration structure into a beneficial sealed configuration by utilizing the inner space of the support device as a controlled environment. The sealing structures transform the opening from a source of pollutant diffusion and heat loss into a protected passage that maintains vacuum integrity

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces vibrations and noise in the vacuum pipe and support device, enhances stability, and minimizes pollutant diffusion and heat loss, ensuring continuous operation without deformation or damage, regardless of changes in reactant gas conditions.

Implementation Method 1

the mass may move by inertia in the opposite direction to the moving direction of the vacuum pipe so as to cushion the vibration of the vacuum pipe

Methodology Applied

Scientific EffectInertia: Inertia

Implementation Method 2

a buffer member, which is coupled to the support member and has a mass accommodated in a sealed inner space thereof so as to dampen the vibration transmitted from the vacuum pipe

Methodology Applied

Scientific EffectVibration damping: Damping

Implementation Method 3

a press member provided adjacent to the vibration prevention member in the accommodation space of the housing and pressurizing the vibration prevention member

Methodology Applied

Scientific EffectPressurization: Pressurisation

Data Source

PatentUS11454336B1Support device of vacuum pipe

Publication Date: 2022.09.27 USG CO LTD

AI summary

According to an embodiment of the present invention, since the vibration transmitted from the vacuum pipe can be reduced according to the movement of the mass, even anti-vibration effect can be expected regardless of the size of the pipe, the characteristics of the fluid or the like and the vibration prevention effect can be improved by further increasing the vibration transmission area by the elasticity of the press member.