Vacuum-Pressure Fluid Transfer System
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Solution Overview
Problem
Conventional fluid delivery systems in semiconductor manufacturing face issues such as high costs due to the use of pressure-rated stainless steel containers, which are reactive with fluids and not easily recyclable, and result in significant fluid waste due to gas entrainment during high-pressure transfer.
Innovation Solution
A fluid delivery system that uses a transfer vessel as a pressure buffer between a bulk canister and a process canister, employing vacuum and pressure cycling to transfer fluid without the need for high-pressure rated containers, allowing for the use of non-stainless steel vessels and minimizing gas entrainment by maintaining a vacuum in the bulk canister.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If pressure-rated stainless steel containers are used for fluid storage and transfer, then fluid delivery reliability is improved, but cost increases and fluid waste occurs due to gas entrainment
Solution Approach 1:
The patent introduces a transfer vessel as an intermediary component between the bulk canister and process canister. This transfer vessel allows fluid to be transferred from a non-pressure-rated bulk canister to a pressure-rated process canister, eliminating the need for expensive stainless steel containers while maintaining delivery reliability. The transfer vessel acts as a mediator that reconciles the conflicting requirements of cost reduction and reliable fluid delivery.
Solution Approach 2:
The system changes the pressure parameter dynamically by applying vacuum to the bulk canister during filling and then using pressure differential to transfer fluid to the process canister. This parameter change allows non-pressure-rated containers to be used effectively, reducing cost while maintaining fluid delivery reliability and minimizing gas entrainment through controlled vacuum conditions.
2Reliability
If stainless steel vessels are used for fluid storage, then pressure rating and cleanliness specifications are met, but reactivity with fluids occurs and recyclability is limited
Solution Approach 1:
The transfer vessel serves as an intermediary that separates the bulk storage function from the process delivery function. This allows the use of non-stainless steel bulk canisters that are cost-effective and recyclable, while the process canister maintains the required cleanliness specifications. The intermediary transfer vessel eliminates the need for stainless steel bulk storage, resolving the reactivity issue.
Solution Approach 2:
The patent enables the use of disposable or recyclable non-stainless steel bulk canisters that are cheaper and more environmentally friendly than stainless steel vessels. These bulk canisters can be easily disposed of or recycled without the need for expensive refurbishment, while the process canister maintains cleanliness requirements through its design and the transfer process.
3Productivity
If high pressure is applied to transfer fluid from bulk canister to process canister, then transfer speed is improved, but gas entrainment increases causing fluid waste
Solution Approach 1:
The system uses periodic vacuum application to the bulk canister to draw fluid into the transfer vessel, then periodically transfers the fluid to the process canister using pressure differential. This periodic action allows controlled fluid transfer that maintains speed while minimizing gas entrainment, as the vacuum phase prevents air from being forced into the fluid stream during transfer.
Solution Approach 2:
The patent changes the pressure parameter from constant high pressure to dynamic pressure cycling between vacuum and positive pressure. This parameter change enables efficient fluid transfer while minimizing gas entrainment, as the vacuum phase creates a pressure gradient that draws fluid without forcing air into the stream, and the subsequent pressure phase transfers the fluid smoothly to the process canister.
4Reliability
If pressure-rated stainless steel containers are used, then fluid delivery reliability is improved, but cost increases due to manufacturing and service
Solution Approach 1:
The transfer vessel acts as an intermediary that separates the bulk storage function from the process delivery function. This allows the use of inexpensive non-stainless steel bulk canisters for bulk storage, while the process canister maintains the required reliability and cleanliness specifications. The intermediary transfer vessel resolves the conflict between low manufacturing cost and high reliability.
Solution Approach 2:
The patent enables the use of disposable or easily manufactured non-stainless steel bulk canisters that are much cheaper than stainless steel pressure-rated containers. These bulk canisters can be produced at low cost and disposed of or recycled easily, while the process canister maintains reliability requirements through its design and the controlled transfer process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces costs by eliminating the need for expensive stainless steel containers and minimizes fluid waste by minimizing gas entrainment, enabling efficient and cost-effective fluid delivery while maintaining compatibility with various fluid types.
Implementation Method 1
a vacuum source arranged for drawing fluid from at least one bulk canister into the transfer vessel
Implementation Method 2
employing vacuum and pressure cycling to transfer fluid
Implementation Method 3
a first source of pressurizing gas arranged for pressure-mediated transfer of fluid from the transfer vessel into process canister
Data Source
AI summary
A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.