Automated Consumable Part Replacement in Vacuum Processing Systems

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Solution Overview

Problem

The existing processing systems face downtime and increased processing stop time due to the manual replacement of consumable parts, which requires opening the processing device to the atmosphere, leading to longer evacuation times and prolonged downtime.

Innovation Solution

A processing system with a control device that estimates and manages the replacement timing of consumable parts, utilizing a part transporting device to move and prepare the replacement parts within the system, allowing for automated replacement without opening the processing device to the atmosphere, thereby reducing downtime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual replacement of consumable parts is performed by opening the processing device to the atmosphere, then the replacement operation becomes simple and accessible, but the processing stop time period increases due to evacuation time required after replacement

Engineering Contradiction:

Improveconsumable part replacement operationVSAvoidprocessing stop time period

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The replacement handler is pre-positioned inside the processing device and maintains readiness to perform replacement operations. The consumable parts are pre-loaded into the handler, and the handler remains in place during substrate processing, so that when replacement is needed, the operation can begin immediately without waiting for manual access or device opening.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The replacement handler acts as an intermediary robotic system that performs the consumable part replacement operation. It includes a gripper mechanism that can grasp and manipulate consumable parts, and it operates autonomously within the vacuum environment, eliminating the need for human operators to open the device and perform manual replacement.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Device complexity

If large consumable parts are replaced manually, then the replacement can be performed with simple equipment, but the replacement time becomes excessively long

Engineering Contradiction:

Improvereplacement equipmentVSAvoidreplacement time

Core Design Contradiction:

Device complexityVSLoss of time

Solution Approach 1:

The replacement handler is equipped with a gripper that can autonomously grasp, extract, and install consumable parts without human assistance. The handler positions itself correctly within the processing device and performs the entire replacement sequence automatically, making the system self-sufficient for maintenance operations.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The manual mechanical replacement operation is replaced with an automated robotic system. The replacement handler uses motorized actuators and controlled gripper mechanisms to perform the replacement, substituting human manual dexterity with automated mechanical precision, thereby reducing replacement time while managing complexity through integration.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Loss of time

If a replacement station with replacement handler is used, then the consumable part can be replaced without opening the processing device to the atmosphere, but the system complexity increases

Engineering Contradiction:

Improveprocessing stop time periodVSAvoidsystem structure

Core Design Contradiction:

Loss of timeVSDevice complexity

Solution Approach 1:

The replacement handler is designed as a multi-functional unit that can handle different types of consumable parts through its gripper mechanism. It integrates positioning, grasping, extraction, and installation functions within a single device, reducing the need for separate specialized equipment for each replacement task.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The replacement handler is nested within the processing device structure, with the gripper mechanism integrated into the existing vacuum chamber environment. The handler components are arranged concentrically or hierarchically within the device, minimizing space requirements and reducing overall system footprint while maintaining full replacement functionality.

Inventive Principle:

Principle #7Nested doll (Nesting)

Data Source

PatentUS11613432B2Processing system and method using transporting device facilitating replacement of consumable part

Publication Date: 2023.03.28 TOKYO ELECTRON LTD

AI summary

A method includes estimating a replacement time of a consumable part of a processing device, specifying a timing after substrate processing of the processing device is completed in a period before the replacement time as a replaceable timing of the consumable part, estimating a movement time period required for the part transporting device to move to a position of the processing device requiring the replacement, and estimating a preparation time period required for preparation until the part transporting device moved to the position of the processing device requiring the replacement becomes a state in which the consumable part is replaceable. The method further includes transmitting a replacement instruction to the part transporting device at a timing before a timing that is earlier than the replaceable timing by a total time of the movement time period and the preparation time period, and instructing the replacement of the consumable part.