Vacuum Processing Apparatus Helical Roller Transport

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Solution Overview

Problem

Existing vacuum processing apparatuses for elongated sheet base materials require multiple processing chambers, leading to large system size, high cost, and low productivity due to separate processing of front and back surfaces.

Innovation Solution

A vacuum processing apparatus with a single processing unit and auxiliary vacuum chamber, utilizing a pair of staggered roller units and shifting means to alternately position the sheet base material's surfaces for processing, allowing efficient processing of both sides with reduced parts and improved transportation speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If separate processing chambers are used for front and back surfaces, then processing quality is maintained, but system size becomes large and cost increases

Engineering Contradiction:
Improveprocessing qualityVSAvoidsystem size
Core Design Contradiction:
Manufacturing precisionVSVolume of stationary object

Solution Approach 1:

The patent combines the processing of front and back surfaces into a single processing chamber by using a sheet base material conveying mechanism that alternately positions both surfaces facing the processing unit. This merging approach eliminates the need for separate processing chambers while maintaining processing quality through controlled alternating exposure of both surfaces to the processing unit.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent employs a dynamic sheet base material conveying mechanism with rollers that can alternately position the front and back surfaces of the sheet base material facing the processing unit. This dynamic positioning system allows both surfaces to be processed sequentially in a single chamber, reducing system size while maintaining processing quality through controlled alternation.

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If separate processing chambers are used for front and back surfaces, then processing is thorough, but the number of parts increases and cost rises

Engineering Contradiction:
Improveprocessing thoroughnessVSAvoidnumber of parts
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent merges multiple processing chambers into a single processing chamber by implementing a sheet base material conveying mechanism that alternately presents both surfaces to the processing unit. This consolidation reduces the number of parts and components required while maintaining thorough processing through sequential exposure of both surfaces.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If the sheet base material is transported through a long path in multiple chambers, then both surfaces can be processed, but productivity decreases

Engineering Contradiction:
Improvesurface processing coverageVSAvoidprocessing speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent implements a dynamic conveying mechanism within a single processing chamber that alternately positions the front and back surfaces of the sheet base material facing the processing unit. This dynamic approach shortens the transport path and enables faster processing by eliminating the need to traverse multiple chambers, thereby improving productivity while maintaining comprehensive surface processing.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent enables continuous processing of both surfaces by using a conveying mechanism that alternately presents each surface to the processing unit in a continuous cycle. This eliminates idle transport time between chambers and maintains continuous useful action, thereby improving productivity while ensuring both surfaces receive thorough processing.

Inventive Principle:
Principle #20Continuity of useful action

4Manufacturing precision

If multiple processing chambers are used, then both surfaces can be processed separately, but the apparatus becomes large and expensive

Engineering Contradiction:
Improvesurface processing capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent combines the functionality of multiple processing chambers into a single processing chamber by implementing a sheet base material conveying mechanism that alternately positions both surfaces facing the processing unit. This merging approach reduces manufacturing costs by eliminating redundant chambers and components while maintaining the capability to process both surfaces with the same level of precision.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus is miniaturized, costs are reduced, and productivity is enhanced by enabling simultaneous processing of both surfaces with a single unit, while maintaining a high vacuum environment for efficient film deposition.

Implementation Method 1

a plurality of rollers (42) disposed at equal intervals from one another, and which are positionally shifted from one another in an axial direction in a staggered manner so as to allow the sheet base material (S) to be helically wound around each of the rollers (42)

Methodology Applied
Scientific EffectHelical winding: Helix

Implementation Method 2

performing predetermined processing in a vacuum processing chamber (1) on an elongated sheet base material (S) transported through the vacuum processing chamber (1)

Methodology Applied
Scientific EffectVacuum: Vacuum

Data Source

PatentUS9109284B2Vacuum processing apparatus
Publication Date: 2015.08.18 ULVAC INC
  • US9109284B2 patent drawing
  • US9109284B2 patent drawing
  • US9109284B2 patent drawing

AI summary

Provided is a low-cost vacuum processing apparatus which enables the miniaturization of the apparatus and achieves good productivity. An elongated sheet base material is transported through a vacuum processing chamber, and predetermined processing is performed on the sheet base material in this vacuum processing chamber. The vacuum processing chamber is provided with a single processing unit, and has an auxiliary vacuum chamber provided in continuation with the vacuum processing chamber. The auxiliary vacuum chamber is provided with a feed roller and a take-up roller. The vacuum processing apparatus includes a pair of first roller units provided on opposite sides across the processing unit in the vacuum processing chamber. Each of the first roller units has multiple rollers disposed at regular distances. The rollers are deviated from each other in the axial direction and arranged in such a staggered manner that the sheet base material is helically wound around the rollers.