Vacuum Processing Apparatus Segmented Conveyance Architecture
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Solution Overview
Problem
Conventional cluster tool vacuum processing systems face limitations in conveyance capability and throughput when multiple process modules perform the same process in parallel, leading to concentrated load on specific vacuum conveyance robots and reduced efficiency, especially in short-time processes.
Innovation Solution
The system is configured with separate vacuum conveyance areas and mechanisms, allowing independent operation to distribute conveyance load and enhance efficiency, along with parallel load-lock modules and atmosphere conveyance robots to manage substrate transfer between the load port and load-lock modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple process modules perform the same process in parallel, then productivity is improved, but the conveyance load concentrates on specific vacuum conveyance robots causing reliability degradation
Solution Approach 1:
The vacuum conveyance chamber is divided into multiple independent vacuum conveyance areas (first vacuum conveyance area and second vacuum conveyance area), each equipped with its own vacuum conveyance robot. This segmentation distributes the conveyance load across multiple independent units, preventing any single robot from becoming a bottleneck while maintaining high throughput for parallel processes.
2Productivity
If the vacuum conveyance chamber is extended in the depth direction to add process modules, then productivity is improved, but device complexity increases
Solution Approach 1:
The system segments the vacuum conveyance chamber into multiple independent conveyance areas with dedicated robots, allowing process modules to be added in an organized manner without creating a monolithic complex system. Each segment operates semi-independently, making the overall system more manageable despite increased capacity.
Solution Approach 2:
The patent extends the vacuum conveyance chamber in the depth direction to accommodate additional process modules while maintaining organizational structure through segmentation. This dimensional expansion is managed by creating layered or distributed conveyance areas rather than simply increasing the size of a single conveyance space.
3Adaptability or versatility
If a relay table is used to connect vacuum conveyance robots in series, then adaptability is improved, but the conveyance load concentrates on the front-side robot causing productivity degradation
Solution Approach 1:
Instead of using a series connection with a relay table that creates a bottleneck, the system segments the conveyance function into multiple parallel vacuum conveyance areas, each with its own robot. This eliminates the sequential dependency and allows simultaneous operations, maintaining flexibility while dramatically improving throughput.
4Adaptability or versatility
If multiple vacuum conveyance robots operate in series, then adaptability is improved, but loss of time increases due to sequential operations
Solution Approach 1:
The system divides the vacuum conveyance chamber into multiple independent conveyance areas that can operate simultaneously. This parallel architecture allows multiple substrate conveyance operations to occur at the same time, reducing the overall conveyance cycle time while maintaining the flexibility to handle various process configurations.
Data Source
AI summary
In this vacuum processing apparatus, four process modules and four load-rock modules are arranged in clusters around a two-stage conveyance vacuum chamber. In the apparatus, the entirety of the second stage of the vacuum conveyance chamber is a third vacuum conveyance area and the third vacuum conveyance area extends from the second stage to the first stage through an aperture to enter between first and second vacuum conveyance areas. A third vacuum conveyance robot has: left and right-side conveyance units, which can move straight in the depth direction in the second stage of the third vacuum conveyance area; and left and right-side conveyance units, which can move straight in the vertical direction, i.e. can move up and down, in the aperture of the vacuum conveyance area.