Vacuum Processing Stations Grouped for Cycle Time Reduction
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Solution Overview
Problem
Existing vacuum processing systems for manufacturing substrates like wafers and solar panels face inefficiencies due to the longest processing time span determining the overall cycle time, leading to high dead times and reduced throughput, especially when processing times vary significantly among stations.
Innovation Solution
The system groups vacuum processing stations into two categories: one group with shorter processing times using simultaneous transport and another with longer processing times using individual transport, allowing for optimized processing cycles by minimizing dead time and maximizing throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If simultaneous transport is used for all vacuum processing stations, then the transport arrangement and time control can be kept simple, but the overall cycle time is determined by the longest processing time span, leading to high dead times
Solution Approach 1:
The patent divides the vacuum processing stations into at least two separate groups: a first group served by a first transport arrangement and a second group served by a second transport arrangement. This segmentation allows each transport arrangement to be optimized independently for its specific group, reducing overall system complexity while improving throughput by enabling parallel processing operations across different groups.
2Stability of the object's composition
If the longest processing time span determines the overall cycle time, then parallel processing is maintained, but shorter processing time spans cannot be exploited, resulting in high dead times
Solution Approach 1:
By creating multiple transport arrangements serving different groups of processing stations, the patent enables continuous useful action across the entire system. While one group is undergoing long-duration processing, the other group can simultaneously undergo short-duration processing, ensuring that no processing station remains idle and dead time is minimized throughout the system.
3Loss of time
If two or more identical vacuum processing stations are used to subdivide processing time spans, then dead time can be minimized, but the device complexity and cost increase
Solution Approach 1:
The patent creates transport arrangements that can serve multiple processing stations within their respective groups, allowing each transport arrangement to perform multiple functions by sequentially serving different stations. This multi-functionality reduces the need for additional specialized equipment while maintaining the ability to minimize dead time through optimized processing sequences.
Data Source
AI summary
For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.