Vacuum Pump Abatement Integration for Backflow Prevention
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Solution Overview
Problem
Conventional exhaust gas treatment systems for semiconductor manufacturing face issues such as contamination of process chambers due to backflow of treated products, high energy consumption, large and costly equipment, and complex maintenance requirements, as well as the need for additional control systems and heating to prevent deposition.
Innovation Solution
A vacuum pump with integrated abatement function, comprising a dry vacuum pump and a booster pump, where the abatement part is connected between the main and booster pumps to treat exhaust gases, reducing backflow and energy consumption, and featuring modular, compact, and easily replaceable abatement parts with a controller for collective operation and energy management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the exhaust gas treatment apparatus is arranged at the upstream side of the vacuum pump, then products generated by exhaust gas treatment cannot flow back to the process chamber, but the amount of gas to be treated increases due to inclusion of purge gas and diluent gas
Solution Approach 1:
The exhaust system is segmented into multiple functional sections: the process chamber, the vacuum pump, and the exhaust gas treatment apparatus are arranged in sequence. This segmentation allows the vacuum pump to handle only the necessary exhaust gases from the process chamber without including purge gas and diluent gas, thereby reducing the amount of gas to be treated while maintaining reliable prevention of backflow contamination through the strategic positioning of the treatment apparatus downstream.
2Quantity of substance
If the exhaust gas treatment apparatus is made large and fixedly installed, then treatment capacity is sufficient, but maintenance becomes difficult and costly
Solution Approach 1:
The exhaust gas treatment apparatus is divided into modular components that can be independently accessed and maintained. The segmented design allows maintenance personnel to service individual modules without dismantling the entire apparatus, reducing maintenance difficulty and cost while preserving sufficient treatment capacity through the coordinated operation of multiple modules.
Solution Approach 2:
A controller acts as an intermediary between the various components of the exhaust gas treatment apparatus and the external environment. This controller facilitates easy maintenance by providing centralized monitoring and control, allowing technicians to diagnose and service the system without complex disassembly, while the controller itself manages the coordinated operation of all treatment modules to maintain sufficient treatment capacity.
3Reliability
If the exhaust gas treatment apparatus is fixedly installed, then stability is improved, but replacement and backup become difficult
Solution Approach 1:
The exhaust gas treatment apparatus employs modular segments that are fixedly installed to provide operational stability while each module can be independently replaced. This segmented architecture allows individual modules to be swapped out for maintenance or upgrades without disturbing the entire system, achieving both stability during operation and adaptability for replacement and backup configurations.
Solution Approach 2:
Different portions of the exhaust gas treatment apparatus have different levels of fixed installation. Critical components requiring high stability are firmly fixed, while other components are designed with local flexibility to allow easy replacement. This local quality approach ensures operational stability where needed while maintaining replaceability for maintenance and backup operations.
4Object-affected harmful factors
If heaters are installed to prevent deposition of products, then deposition is avoided, but initial cost and running cost increase
Solution Approach 1:
The harmful factor causing deposition is extracted and addressed at its source - the exhaust gas treatment apparatus. By treating the exhaust gases to prevent product formation before they reach the vacuum pump and piping, the need for additional heaters is eliminated. This approach removes the deposition problem without incurring the energy costs and initial expenses of installing and operating heater systems.
Solution Approach 2:
The exhaust gas treatment apparatus converts the potentially harmful exhaust gases into beneficial treated gases before they reach the vacuum system. This conversion process prevents deposition without requiring additional energy-intensive heating measures, transforming what would be a harmful contamination issue into an opportunity for energy-efficient prevention through proper gas treatment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents contamination of process chambers, reduces energy consumption by minimizing treated gas volume, allows for efficient and cost-effective maintenance, and enables seamless backup operations with reduced downtime and operational complexity.
Implementation Method 1
plasma-type abatement part
Implementation Method 2
heater-type abatement part
Implementation Method 3
dry-type abatement part
Implementation Method 4
catalytic-type abatement part
Data Source
AI summary
A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.