Parallel Vacuum Pump Synchronization to Prevent Oil Backflow

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Solution Overview

Problem

Vacuum pumping systems with multiple positive displacement pumps connected in parallel face contamination risks due to backflow of oil vapors when one pump fails, especially in systems without external isolation devices, leading to contamination of the vacuum chamber.

Innovation Solution

A management unit synchronizes the operation of positive displacement vacuum pumps by monitoring and adjusting operational parameters to prevent backflow, including adjusting pump speeds and switching off pumps when threshold conditions are met, thereby preventing contamination without the need for additional external devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple positive displacement vacuum pumps are connected in parallel to the same vacuum chamber, then the pumping capacity and productivity are improved, but the risk of contamination from oil vapor backflow increases when one pump fails

Engineering Contradiction:
Improvepumping capacityVSAvoidcontamination risk
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The control unit continuously monitors the operational status of each vacuum pump and uses this feedback to automatically adjust pump operation. When a pump fails or abnormal conditions are detected, the control unit responds by adjusting the operation of other pumps to prevent oil vapor backflow and contamination of the vacuum chamber.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically adjusts pump operation based on real-time conditions. The control unit can independently control the start, stop, and speed adjustment of each pump based on their operational status, transforming the static parallel connection into a dynamically adaptable system that prevents contamination while maintaining high pumping capacity.

Inventive Principle:
Principle #15Dynamics

2Object-affected harmful factors

If protection devices such as anti-backflow valves are installed on each pump, then contamination risk is reduced, but device complexity increases

Engineering Contradiction:
Improvecontamination riskVSAvoidsystem complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The control unit enables the vacuum pump system to self-regulate and protect itself from contamination without requiring additional external protection devices. By monitoring pump status and automatically adjusting operation, the system performs its own protection function, eliminating the need for separate anti-backflow valves and reducing overall system complexity.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The control unit serves multiple functions: it monitors pump status, controls pump operation, prevents contamination, and manages the overall system. This multi-functionality replaces what would otherwise require separate dedicated protection devices, reducing system complexity while maintaining contamination protection.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If external isolation devices are introduced to prevent backflow, then vacuum chamber integrity is protected, but ease of operation and system simplicity are reduced

Engineering Contradiction:
Improvevacuum chamber integrityVSAvoidsystem simplicity
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The control unit enables the system to automatically protect the vacuum chamber from contamination through intelligent control of pump operation. The system monitors itself and takes corrective action without external intervention, maintaining vacuum chamber integrity while preserving operational simplicity and avoiding additional isolation devices.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS12173712B2Vacuum pumping system having a plurality of positive displacement vacuum pumps and method for operating the same
Publication Date: 2024.12.24 AGILENT TECHNOLOGIES INC
  • US12173712B2 patent drawing
  • US12173712B2 patent drawing
  • US12173712B2 patent drawing

AI summary

A vacuum pumping system includes a plurality of positive displacement vacuum pumps, and more particularly a plurality of positive displacement vacuum pumps working in parallel. The vacuum pumping system includes a management unit that carries out a synchronized control of all the positive displacement vacuum pumps of the vacuum pumping system and thus allows to check possible risk of contamination of the vacuum pumping system and carry out, if needed, the necessary corrective actions without requiring any modification to the construction of the vacuum pumping system.