Vacuum Pump Shut-Off Valve for Early Backflow Closure

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Solution Overview

Problem

Existing shut-off valves in vacuum pump systems, such as those described in JP-A-2013-167207, fail to sufficiently prevent atmospheric air from entering the vacuum pump due to the valve element being pushed by atmospheric air, leading to potential bearing damage and rotor breakdown.

Innovation Solution

A shut-off valve is designed with a valve element and pressure receiving portion that moves to contact the valve seat upon receiving pressure from backflowing gas, ensuring the valve element closes before atmospheric air reaches it, thereby reducing atmospheric air inflow into the vacuum pump.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the valve element is pushed by atmospheric air to close the valve, then the valve can be actuated by the pressure difference, but atmospheric air enters the housing before the valve element closes, preventing sufficient prevention of air inflow

Engineering Contradiction:
Improveprevention of atmospheric air entryVSAvoidatmospheric air inflow
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The pressure receiving portion is positioned downstream of the valve element and receives backflowing gas pressure before the valve element is pushed by atmospheric air. This preliminary reception of pressure initiates the valve closing action earlier in the sequence, creating a time buffer that prevents atmospheric air from entering the housing before the valve seals.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The pressure receiving portion acts as an intermediary component that captures the backflowing gas pressure and transmits it to the valve element. This intermediary mechanism allows the valve to respond to pressure changes in a controlled sequence, ensuring closure occurs before atmospheric air can penetrate the housing.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If the valve element is directly pushed by atmospheric air, then the structure is simple, but the closing action occurs too late to prevent air entry into the housing

Engineering Contradiction:
Improvevalve structureVSAvoidtiming of valve closure
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The pressure receiving portion is strategically positioned to intercept backflowing gas pressure before atmospheric air reaches the valve element. This creates a preliminary triggering mechanism that initiates valve closure in advance, solving the timing issue without requiring complex control systems or additional actuation mechanisms.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces the inflow of atmospheric air into the vacuum pump, preventing bearing and rotor damage by ensuring the valve element closes before exposure to atmospheric air, thus enhancing system reliability.

Implementation Method 1

The pressure receiving portion (35) is movable to the valve seat (47) by receiving the pressure of gas flowing back to the valve seat (47)

Methodology Applied
Scientific EffectGas pressure: Pressure Increase

Data Source

PatentUS20240288075A1Shut-off valve, vacuum pump system, and vacuum pump
Publication Date: 2024.08.29 SHIMADZU CORP
  • US20240288075A1 patent drawing
  • US20240288075A1 patent drawing
  • US20240288075A1 patent drawing

AI summary

A shut-off valve 1 is a shut-off valve arranged on the downstream side with respect to an exhaust port of a vacuum pump, and includes a valve seat, a valve element, and a pressure receiving portion. The valve element is arranged on the downstream side with respect to the valve seat, and is configured movable so as to contact the valve seat or separate from the valve seat. The pressure receiving portion is arranged on the downstream side with respect to the valve element, and is movable to the valve seat by receiving the pressure of gas flowing back to the valve seat. The valve element is connected to the pressure receiving portion, and moves to the valve seat along with movement of the pressure receiving portion to the valve seat.