Vacuum Pump Controller Abnormality Segmentation
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Solution Overview
Problem
Existing vacuum pump control systems issue critical alarms based solely on the cumulative number of axial displacement detections, leading to unnecessary shutdowns and interference with gas discharge operations, particularly in semiconductor manufacturing, due to the lack of consideration for other types of abnormalities.
Innovation Solution
A control device for a vacuum pump that counts the occurrences of multiple types of abnormalities and issues a critical alarm only when the number of each type exceeds predetermined thresholds, preventing erroneous alarms by considering the probability of breakdown.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a critical alarm is issued based solely on the cumulative number of axial displacement detections, then the alarm sensitivity is improved, but the false alarm rate increases
Solution Approach 1:
The alarm determination is segmented into multiple independent abnormality types (axial displacement, vibration, temperature, current) rather than relying on a single detection criterion. Each abnormality type is evaluated separately with its own occurrence count, and only when multiple types simultaneously exceed thresholds does the critical alarm activate, thereby reducing false alarms while maintaining sensitivity
Solution Approach 2:
The alarm system transitions from one-dimensional detection (single axial displacement metric) to multi-dimensional detection by incorporating multiple abnormality types across different operational parameters. This dimensional expansion allows the system to distinguish between isolated anomalies and genuine breakdown risks, resolving the contradiction between sensitivity and false alarm rate
2Reliability
If the vacuum pump is stopped immediately upon alarm issuance, then equipment safety is improved, but manufacturing productivity decreases
Solution Approach 1:
The alarm response strategy transitions from static (immediate shutdown) to dynamic (conditional response). The system adaptively determines whether to shutdown based on real-time evaluation of multiple abnormality types and their occurrence patterns, allowing continuous operation when false alarms are detected and immediate shutdown only when genuine breakdown risks are confirmed, thus balancing safety with productivity
Data Source
AI summary
The object of the disclosure is to prevent erroneous transition of an operation mode to an operation limitation mode. A control device 6 includes a controller 62. The controller 62 counts the number of times of occurrence of each of multiple types of abnormalities occurred in a vacuum pump 1, and issues a critical alarm in a case where the number of times of occurrence of each of the multiple types of abnormalities exceeds a predetermined threshold.