Vacuum Pump Cooling Jacket with Dual-Surface Heat Exchange
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Solution Overview
Problem
Vacuum pumps, such as turbomolecular pumps, face challenges in efficiently cooling electrical equipment due to increased mounting density and temperature issues, where traditional water-cooling methods struggle to cool larger areas and air cooling complicates downsizing and increases energy consumption, while maintaining a clean environment.
Innovation Solution
A vacuum pump design featuring a control device with a cooling portion having multiple cooling surfaces and a cooling medium flow passage, where electrical component portions are attached to these surfaces for efficient heat transfer, and a mold portion covers the components to enhance cooling, allowing for downsizing without using cooling fans.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If water-cooling type cooling device is used, then cooling efficiency is improved, but the cooling area is limited to the outer shape of the cooling device
Solution Approach 1:
The cooling device utilizes both the outer surface and the inner surface of the cooling jacket as cooling surfaces, effectively doubling the cooling area available for heat dissipation. This dimensional utilization allows the cooling system to handle larger thermal loads without increasing the physical footprint of the cooling device itself.
2Area of stationary object
If air cooling using cooling fan is used, then cooling area is expanded, but the external dimensions of the vacuum pump increase
Solution Approach 1:
The cooling function is merged into the structural jacket of the control device, which serves both as a mechanical housing and as a heat dissipation structure. This integration eliminates the need for separate cooling fans and air cooling mechanisms, maintaining compact dimensions while providing effective cooling through the dual-surface heat exchange design.
3Area of stationary object
If air cooling using cooling fan is used, then cooling area is expanded, but dust is raised in the clean room
Solution Approach 1:
The air cooling fan and its associated dust-raising effects are extracted and removed from the system. Instead, the patent employs a closed-loop water cooling system that operates silently without disturbing the clean room environment, while still providing adequate cooling through the expanded effective cooling surfaces.
4Area of stationary object
If air cooling using cooling fan is used, then cooling area is expanded, but total energy consumption increases
Solution Approach 1:
The cooling system operates passively through natural convection and conduction across the cooling jacket surfaces, without requiring active mechanical components like fans. This self-service cooling approach significantly reduces energy consumption while maintaining effective heat dissipation across the available surfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables efficient cooling of electrical equipment, extends the life of the equipment, and maintains a clean environment by avoiding the use of cooling fans, while allowing for compact sizing and reduced energy consumption.
Implementation Method 1
a cooling portion which has a cooling surface and in which a cooling medium flow passage is formed, and a plurality of electrical component portions that each have a heat generating component and is capable of being by the cooling portion
Implementation Method 2
a plurality of the cooling surfaces are formed facing different directions, and the plurality of electrical component portions are attached to the plurality of cooling surfaces respectively so that heat can be transferred
Data Source
AI summary
To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump includes a pump main body and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket which has an inner surface and an outer surface in a vertical portion and in which a cooling medium flow passage is formed, and a plurality of electrical equipment that have circuit components and can be cooled by the cooling jacket. The inner surface and the outer surface are formed facing different directions, and the electrical equipment portions are attached respectively to the inner surface and the outer surface so that heat can be transferred.