Vacuum Pump Cover with Air Insulating Layer for Burn Prevention
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Solution Overview
Problem
Vacuum pumps used in semiconductor manufacturing, such as turbo-molecular pumps, face issues with rotor interference and the need for frequent overhauls due to product adherence, and high-temperature components pose a risk of burns to users.
Innovation Solution
A vacuum pump design featuring a cover member arranged around the stator cylindrical portion and base through an air insulating layer, which prevents users from touching high-temperature areas and is cooled by a nearby cooling device, reducing the risk of burns and simplifying the configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the temperature of the stator cylindrical portion and base is increased to high temperature to prevent adherence of reactive product, then product adherence is prevented, but the risk of user touching high-temperature portion increases
Solution Approach 1:
A cover member is introduced as an intermediary protective element between the high-temperature base/stator cylindrical portion and the user. The cover member is positioned to cover the outer peripheral side of the base and stator cylindrical portion, creating a physical barrier that prevents direct user contact with hot surfaces while allowing the internal components to maintain their high operating temperature for preventing product adherence
Solution Approach 2:
The temperature distribution is differentiated across different regions: the stator cylindrical portion and base maintain high temperature internally for preventing product adherence, while the cover member and its outer surfaces maintain lower temperature for user safety. This local quality differentiation allows simultaneous achievement of both reliability (preventing adherence) and safety (preventing user burn)
2Object-affected harmful factors
If a cover member is added to cover the high-temperature portion, then user safety is improved, but the device complexity increases
Solution Approach 1:
The cover member is designed as a thin-walled protective shell that covers the outer peripheral side of the base and stator cylindrical portion. This thin-film approach provides effective thermal protection and user safety while minimizing the added complexity and volume. The cover member can be made of materials with good thermal insulation properties and can be easily attached to the existing structure
Solution Approach 2:
The cover member serves multiple functions simultaneously: it acts as a thermal barrier to protect users from high-temperature portions, provides a protective enclosure for the internal components, and can serve as a mounting surface for the cooling device. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents user contact with high-temperature portions by using an air insulating layer and cooling mechanism, enhancing safety and reducing the risk of burns while maintaining a cost-effective and simple design.
Implementation Method 1
covering the base through an air insulating layer
Implementation Method 2
a cooling device attached to the base... contacting the cooling device
Data Source
AI summary
A vacuum pump comprises: a rotor cylindrical portion; a motor configured to rotate the rotor cylindrical portion; a stator cylindrical portion, the rotor cylindrical portion and the stator cylindrical portion together forming a screw groove pump; a base housing the rotor cylindrical portion and the stator cylindrical portion; a heater configured to heat the base or the stator cylindrical portion; a cooling device attached to the base; and a cover member arranged at an outer peripheral side of the stator cylindrical portion and an outer peripheral side of the base, covering the base through an air insulating layer, and contacting the cooling device.