Vacuum Pump Bellows Damper With External Crash-Locking Flanges

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Solution Overview

Problem

Existing damping bodies for vacuum pumps, particularly turbomolecular pumps, fail to maintain a secure connection with recipients during a rotor crash, leading to potential damage from high torque and axial forces, which can cause the corrugated bellows to rupture and result in uncontrolled movement of the vacuum pump and its parts.

Innovation Solution

A damping body with securing elements connected to the flanges outside the corrugated bellows, which limit twisting and axial movement, redirecting torque and forces away from the bellows and maintaining the connection between the vacuum pump and recipient, thus protecting the bellows and preventing uncontrolled movement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If retaining brackets are arranged inside the corrugated bellows to prevent extension, then the bellows is protected against over-extension, but the fluidic conductance of the connection is impaired and vacuum-related properties deteriorate

Engineering Contradiction:
Improveprotection against over-extensionVSAvoidfluidic conductance
Core Design Contradiction:
StrengthVSProductivity

Solution Approach 1:

The retaining brackets are extracted from the interior of the corrugated bellows and repositioned to the exterior surface of the pump-side flange. This relocation eliminates their interference with the fluid path through the bellows, maintaining optimal fluidic conductance while preserving their protective function against over-extension.

Inventive Principle:
Principle #2Taking out (Extraction)

2Stability of the object's composition

If no securing elements are provided outside the corrugated bellows, then the bellows remains flexible and vacuum-tight, but the connection cannot withstand high torque and axial forces during rotor crash

Engineering Contradiction:
Improvevacuum-tight connectionVSAvoidresistance to rotor crash forces
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The securing function is segmented into two independent systems: (1) the corrugated bellows maintains vacuum-tight flexible connection, and (2) separate securing elements mounted on the flange exterior provide mechanical strength against rotor crash forces. This segmentation allows each component to optimize its specific function without compromising the other.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The securing elements act as intermediary components that transfer and absorb the high torque and axial forces generated during rotor crash, preventing these forces from being transmitted to the corrugated bellows and compromising the vacuum seal.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Force

If retaining brackets are used inside the corrugated bellows, then some mechanical support is provided, but they do not sufficiently limit rotation of flanges and cannot prevent damage during rotor crash

Engineering Contradiction:
Improvemechanical supportVSAvoidprotection against rotor crash
Core Design Contradiction:
ForceVSReliability

Solution Approach 1:

The securing elements extend in the radial direction outward from the flange surface, creating a new spatial dimension for force resistance. This radial extension allows the securing elements to effectively limit flange rotation and absorb axial forces during rotor crash, a function that internal retaining brackets cannot achieve.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively protects the corrugated bellows from damage during a rotor crash, ensuring the vacuum pump remains securely attached to the recipient and preventing hazardous uncontrolled movement, while also improving fluid conductivity by eliminating the need for internal retaining brackets.

Implementation Method 1

A corrugated bellows is usually arranged between the flange on the pump side and the flange on the recipient side, which consists of a thin metal material and produces a vacuum-tight connection

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

The vibration-decoupled connection between the recipient and the vacuum pump is usually produced by means of a damping body

Methodology Applied
Scientific EffectVibration damping: Damping

Data Source

PatentEP3447298B1Vibration damper for coupling a vacuumpumpe
Publication Date: 2022.02.09 PFEIFFER VACUUM GMBH
  • EP3447298B1 patent drawingFigure 1a~1b
  • EP3447298B1 patent drawingFigure 2~3
  • EP3447298B1 patent drawingFigure 4

AI summary

A damping element for a vibration-isolated connection of a vacuum pump, in particular a turbomolecular pump, to a receiver comprises a pump-side flange for attaching the damping element to the vacuum pump, a receiver-side flange for attaching the damping element to the receiver, and a bellows by means of which the pump-side flange and the receiver-side flange are vacuum-tightly connected to each other. The damping element further comprises at least one locking element connected to the pump-side and/or the receiver-side flange, which is arranged outside the bellows and which limits rotation and/or axial separation of the flanges relative to each other.