Vacuum Pump Flexible Wiring Layout for Compact Magnetic Bearing Design

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional vacuum pumps used in semiconductor manufacturing and high-energy physics are bulky, heavy, and costly due to the use of numerous wire cables for power and control signals, which also hinder size reduction and workability.

Innovation Solution

The implementation of flexible printed wiring boards for electrical connections within the pump main body, control unit, and between them, along with a connector system that allows easy attachment and reduces space and weight, enabling size reduction and improved workability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If wire cables are used for electrical connections in the vacuum pump, then electrical connection reliability is improved, but the pump size and weight increase significantly

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidvacuum pump weight
Core Design Contradiction:
ReliabilityVSWeight of stationary object

Solution Approach 1:

The patent replaces traditional wire cables with a flexible printed circuit board (FPC) for electrical connections. The FPC uses printed conductive patterns on a flexible substrate instead of bundled wire cables, significantly reducing weight while maintaining electrical connection reliability through controlled impedance traces and reliable solder connections.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs a flexible printed circuit board made from thin flexible substrate material to replace bulky wire cables. The FPC can be bent and shaped to fit within the compact pump structure while providing stable electrical connections, thus reducing both weight and space occupation.

Inventive Principle:
Principle #30Flexible shells and thin films

2Adaptability or versatility

If wire cables are used for electrical connections in the vacuum pump, then electrical connection flexibility is improved, but the pump size and manufacturing cost increase

Engineering Contradiction:
Improvecable flexibilityVSAvoidvacuum pump volume
Core Design Contradiction:
Adaptability or versatilityVSVolume of stationary object

Solution Approach 1:

The flexible printed circuit board is made from a thin, flexible substrate that can be bent and shaped to accommodate various routing requirements within the pump. This flexible film structure provides the necessary adaptability while occupying minimal space compared to traditional wire cable bundles.

Inventive Principle:
Principle #30Flexible shells and thin films

3Reliability

If wire cables are used for electrical connections in the vacuum pump, then electrical connection capability is improved, but workability and ease of installation deteriorate

Engineering Contradiction:
Improveelectrical connection capabilityVSAvoidworkability
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces the mechanical assembly of multiple wire cables with a pre-fabricated flexible printed circuit board. The FPC comes as a single integrated component with all electrical connections already established through printing processes, eliminating the need for complex cable bundling and connection assembly operations.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Reliability

If wire cables are used for electrical connections in the vacuum pump, then power and signal transmission is improved, but manufacturing cost increases

Engineering Contradiction:
Improvepower and signal transmissionVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces expensive wire cables with a flexible printed circuit board manufactured using cost-effective printing processes. The conductive patterns are deposited directly onto the flexible substrate through lamination or printing techniques, significantly reducing material and manufacturing costs while maintaining reliable power and signal transmission capabilities.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentEP3040561B1Vacuum pump
Publication Date: 2024.09.11 EDWARDS JAPAN
  • EP3040561B1 patent drawingFigure 1
  • EP3040561B1 patent drawingFigure 2
  • EP3040561B1 patent drawingFigure 3(a)~3(b)

AI summary

The present invention provides a vacuum pump with which size and weight reduction, improvement of workability, and cost reduction can be realized. Electrical connection between a pump main body 11 that has a rotor 19 supported by a magnetic bearing and a control unit 12 that controls the drive of the pump main body 11 is established by a flexible printed wiring board 41 configured by printing an electric circuit on a surface of a sheet-like insulating substrate.