Vacuum Pump Gas Injection for Deposit Removal

Solution Overview

Problem

Conventional methods for removing deposited products in vacuum pumps, such as TiF4 or AlCl3, using heating and thermal insulation can lead to material strength reduction and breakage due to creep strain, especially in high-speed rotating components, and are ineffective for gases with high sublimation temperatures.

Innovation Solution

A vacuum pump design with injection holes on the inner wall surface for injecting a removing gas to physically peel off deposited products, avoiding the need for heating and thermal insulation, and including control means to manage pressure, flowrate, and injection time of the removing gas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If heating and thermal insulation means are used to remove deposited products, then the deposited product can be removed, but the rotating body is heated causing material strength reduction and breakage

Engineering Contradiction:

Improvedeposited product removal capabilityVSAvoidrotating body material strength

Core Design Contradiction:

Ease of manufactureVSStrength

Solution Approach 1:

The patent replaces the thermal field (heating) with a gas flow field. A gas flow path is formed between the rotating body and stator component, and a gas stream is introduced to physically blow away deposited products, substituting thermal removal with mechanical gas flow removal.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses pneumatic means by introducing a gas stream through a gas supply system with flow control valve to remove deposited products from the flow path. The gas flow physically carries away the deposits without heating the rotating body.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Ease of manufacture

If heating and thermal insulation means are used to remove deposited products, then the deposited product can be removed, but the rotating body deforms due to creep strain

Engineering Contradiction:

Improvedeposited product removal capabilityVSAvoidrotating body shape

Core Design Contradiction:

Ease of manufactureVSShape

Solution Approach 1:

The patent replaces the thermal field (heating) with a gas flow field. A gas flow path is formed between the rotating body and stator component, and a gas stream is introduced to physically blow away deposited products, substituting thermal removal with mechanical gas flow removal.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of manufacture

If heating and thermal insulation means are used to remove deposited products, then the deposited product can be removed, but the rotating body and stator component break due to contact

Engineering Contradiction:

Improvedeposited product removal capabilityVSAvoidrotating body and stator component integrity

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces the thermal field (heating) with a gas flow field. A gas flow path is formed between the rotating body and stator component, and a gas stream is introduced to physically blow away deposited products, substituting thermal removal with mechanical gas flow removal.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The gas stream acts as an intermediary substance that removes deposited products without direct contact between the rotating body and stator component. The gas flow carries away deposits that would otherwise cause the components to touch and break.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Ease of manufacture

If conventional heating method is used, then deposited product can be removed, but the method is not effective for gases with high sublimation temperatures

Engineering Contradiction:

Improvedeposited product removal capabilityVSAvoidapplicability to different gas types

Core Design Contradiction:

Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent replaces the thermal field (heating) with a gas flow field. A gas flow path is formed between the rotating body and stator component, and a gas stream is introduced to physically blow away deposited products, substituting thermal removal with mechanical gas flow removal.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the removal mechanism from thermal (temperature-based) to pneumatic (flow-based). By controlling gas flow rate and pressure, the system can effectively remove deposits from various gas types including those with high sublimation temperatures that cannot be removed by heating.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively removes deposited products without causing material failure or breakage, ensuring the vacuum pump's structural integrity and efficiency in handling gases with high sublimation temperatures.

Implementation Method 1

a removing means (RM) having an injection hole (91, 92, 93, 94, 95) with one end opened at the inner wall surface of the flow path (R) and configured to inject a removing gas into the flow path (R) through the injection hole (91, 92, 93, 94, 95)

Methodology Applied

Scientific EffectGas flow physical force:

Data Source

PatentUS11466701B2Vacuum pump, and stator component, discharge port, and control means used therein

Publication Date: 2022.10.11 EDWARDS JAPAN

AI summary

To provide a vacuum pump suited for removal of a product deposited in a flow path of the vacuum pump, and a stator component, a discharge port, and control means that are used in the vacuum pump. A vacuum pump includes a flow path through which a gas is transferred from an inlet port toward an outlet port and removing means that removes a product deposited on an inner wall surface of the flow path. The removing means has injection holes with one ends opened at the inner wall surface of the flow path and injects the removing gas into the flow path through the injection holes.