Vacuum Pump Guide Structure for Deposit Removal
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Solution Overview
Problem
High-vacuum pumps, particularly turbomolecular pumps, face premature failure due to deposits from condensing gases, which can cause imbalance and require effective removal without significantly reducing pumping speed.
Innovation Solution
A device with a guide structure that forces gas molecules to undergo at least two collisions with a wall surface before reaching the pump, increasing condensation and deposition on accessible parts for easy cleaning, while maintaining minimal impact on pumping speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If baffles are provided in the housing to remove critical gases from the gas flow, then the formation of deposits in the high-vacuum pump is reduced, but the pumping speed is reduced
Solution Approach 1:
The device segments the gas flow path into multiple sections with alternating flow directions, creating multiple wall collision opportunities. The guide structure divides the single-stage protection into two or more collision stages, allowing deposits to be removed at each stage rather than accumulating in the pump
Solution Approach 2:
The guide structure introduces angular/vertical dimensions to the gas flow path, forcing molecules to collide with walls at different angles and positions. This multi-dimensional approach increases the probability of condensation and deposition on accessible surfaces rather than allowing direct linear flow to the pump
2Reliability
If the number of wall collisions is increased to improve deposition, then the protection of the high-vacuum pump is enhanced, but the device complexity increases
Solution Approach 1:
The guide structure is merged with the device housing itself, using the housing walls as collision surfaces rather than adding separate complex components. The guide plates are integrated into the existing structure, combining protection function with the housing design
Solution Approach 2:
The device uses its own housing walls and internal surfaces as the collision surfaces for gas molecules. The structure serves dual purposes: containing the gas flow and providing the collision surfaces needed for deposit removal, eliminating the need for separate complex protection mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Significantly reduces the number of critical gas molecules reaching the high-vacuum pump, preventing deposits and extending pump lifespan with minimal loss in pumping speed and facilitating maintenance.
Implementation Method 1
Impact with a wall surface of the device increases the likelihood of condensation of critical molecules, such as metallic vapors or non-metals such as selenium and sulfur, in the device
Implementation Method 2
Impact with a wall surface of the device increases the likelihood of condensation of critical molecules... the molecules deposited in the device can no longer be deposited in the high-vacuum pump
Data Source
Figure 1
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Figure 4~5
AI summary
The device (30) has a pump flange (6) for connecting the device with a high vacuum pump (2) i.e. turbomolecular pump. A lead structure (50) is arranged such that molecules e.g. metallic vapor or non-metal such as selenium and sulfur, from an inner space (12) of a chamber (10) are directly passed through another pump flange (32) and conduct thrusts with the device in a path between the flanges. The lead structure is connected with cooling devices, and an inner body (52) is connected with the cooling devices. The lead structure and the inner body are separated by a maintenance flange (36). The cooling devices include a coolant inlet (40), coolant pipe (42) and a coolant outlet (44). An independent claim is also included for an arrangement comprising a device.