Vacuum Pump Intermittent Heating Prevents By-Product Deposition

The patent implements periodic reciprocating motion of the pump rotor through intermittent heating of the bearing. The heater operates in cycles, causing the bearing to expand and contract, which in turn makes the pump rotor move back and forth periodically. This periodic reciprocating action effectively scrapes by-products from the pump chamber walls while maintaining continuous operation, resolving the contradiction between productivity and reliability.

The patent uses thermal expansion and contraction of the bearing to induce mechanical reciprocating motion in the pump rotor. This reciprocating motion creates a scraping effect that prevents by-products from adhering to the pump chamber walls and rotor surfaces, thereby reducing harmful deposition while maintaining high-speed rotation for productivity.

The patent enables the vacuum pump system to perform self-maintenance by incorporating a heater that induces reciprocating motion of the pump rotor during normal operation. This self-service mechanism continuously scrapes by-products without requiring external intervention or system shutdown, thereby maintaining both reliability and productivity simultaneously.

The patent changes the operational parameters of the bearing by applying periodic thermal energy through a heater. This parameter change causes the bearing to expand and contract, which indirectly drives the pump rotor to reciprocate. By changing the thermal state of the bearing rather than directly heating the pump chamber, the system achieves by-product removal with relatively simple device complexity.