Vacuum Pump Exhaust Heating with Parallel Elements and Failure Detection
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Solution Overview
Problem
Conventional vacuum pumps with series-connected resistance heating elements are prone to complete shutdown upon failure, leading to reduced exhaust efficiency and shortened heating means life, causing product deposition and operational interruptions in semiconductor manufacturing.
Innovation Solution
A vacuum pump design with resistance heating elements connected in parallel to wiring lines, incorporating a current measuring means to detect failures and ensure continuous heating, even if individual elements fail, using connectors for easy maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If resistance heating elements are connected in series, then the heating means can be simplified in structure, but the reliability decreases because failure of any element causes complete shutdown of heating
Solution Approach 1:
The heating means is segmented into multiple independent resistance heating elements that can be connected in parallel. Each element operates independently, so failure of one element does not affect the others. This segmentation allows the system to maintain partial heating capability even when individual elements fail, thereby improving reliability while keeping the overall structure manageable.
Solution Approach 2:
The electrical connection configuration is changed from series to parallel. This parameter change fundamentally alters the system's failure mode: in parallel connection, the total resistance decreases and the failure of one element only reduces the total heating capacity partially, rather than causing complete shutdown as in series connection. This parameter change directly resolves the reliability issue.
2Reliability
If resistance heating elements are connected in parallel, then the reliability of heating operation is improved, but the device complexity increases
Solution Approach 1:
The heating means is segmented into multiple independent resistance heating elements that can be connected in parallel. Each element operates independently, so failure of one element does not affect the others. This segmentation allows the system to maintain partial heating capability even when individual elements fail, thereby improving reliability while keeping the overall structure manageable.
3Device complexity
If heating means completely shuts down due to element failure, then the structure remains simple, but product deposition occurs and exhaust efficiency decreases
Solution Approach 1:
The parallel connection of resistance heating elements ensures continuity of the heating action. When one element fails, the other elements continue to operate and maintain heating in the exhaust flow path. This continuous heating prevents product deposition and maintains exhaust efficiency, ensuring the useful action (heating to prevent deposition) continues without interruption despite individual element failures.
4Ease of manufacture
If series connection is used, then the heating means is easier to manufacture, but the life of heating means is shortened due to complete shutdown upon failure
Solution Approach 1:
The heating means is segmented into multiple independent resistance heating elements that can be connected in parallel. Each element operates independently, so failure of one element does not affect the others. This segmentation allows the system to maintain partial heating capability even when individual elements fail, thereby improving reliability while keeping the overall structure manageable.
Solution Approach 2:
The parallel connection of resistance heating elements ensures continuity of the heating action. When one element fails, the other elements continue to operate and maintain heating in the exhaust flow path. This continuous heating prevents product deposition and maintains exhaust efficiency, ensuring the useful action (heating to prevent deposition) continues without interruption despite individual element failures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration maintains continuous heating of the exhaust flow path, preventing product deposition and extending the life of the heating means, ensuring uninterrupted operation of semiconductor manufacturing devices.
Implementation Method 1
a plurality of resistance heating elements RE connected in parallel to a pair of wiring lines WL1, WL2
Data Source
AI summary
A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.