Vacuum Pump Isolation Stops for Malfunction Displacement Control
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Solution Overview
Problem
Current vacuum systems lack effective safety mechanisms to mitigate damage and risk during pump malfunctions, particularly in vibration-sensitive applications like lithography, where pump failures can lead to catastrophic failures and safety hazards due to uncontrolled vibrations and displacement.
Innovation Solution
A vacuum system design that includes a vibration isolator coupled to the pump housing and a stop structure or collar to prevent excessive displacement and vibration transmission, featuring protruding structures that engage with corresponding depressions or slots to limit rotational and axial movement, thereby absorbing kinetic energy and preventing damage during malfunctions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the pump is directly coupled to the rigid structure, then the structural support is strong, but the vibration transmits to the rigid structure causing damage
Solution Approach 1:
A vibration isolator is introduced as an intermediary component between the pump and the rigid structure. This isolator absorbs and dampens vibrations generated by the pump, preventing their transmission to the rigid structure while still providing necessary structural support. The isolator acts as a mediator that decouples the harmful vibration transmission path.
Solution Approach 2:
The coupling between the pump and rigid structure is segmented into two separate functions: the vibration isolator handles vibration absorption, while the mounting structure provides structural support. This segmentation allows each component to optimize its specific function without compromising the other.
2Object-affected harmful factors
If the pump is isolated from the rigid structure, then vibration transmission is prevented, but the pump can rotate excessively during malfunction
Solution Approach 1:
Stop structures with protrusions and corresponding depressions are pre-configured in the rigid structure before pump operation. These features are positioned to engage with the pump housing if excessive rotation occurs during malfunction, limiting the pump's rotational movement to a safe threshold amount and preventing catastrophic failure.
Solution Approach 2:
The stop structures act as pre-positioned protective measures that engage only when needed. During normal operation, the isolated pump operates freely with vibration isolation. During malfunction, the protrusions engage with depressions to provide immediate mechanical stopping, cushioning against excessive rotation and potential damage.
3Reliability
If the pump is constrained to prevent rotation, then malfunction damage is limited, but normal vibration isolation performance deteriorates
Solution Approach 1:
The constraint system is designed to be dynamic rather than static. The stop structures with protrusions and depressions remain disengaged during normal operation, allowing the vibration isolator to function freely. During malfunction, when excessive rotation occurs, the protrusions engage with the depressions to provide mechanical stopping. This dynamic behavior ensures that malfunction protection is activated only when needed, without compromising normal vibration isolation performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively limits pump displacement and absorbs kinetic energy during failures, ensuring safety and minimizing damage to surrounding components while maintaining normal operational vibration isolation performance.
Implementation Method 1
a vibration isolator coupled to the pump housing and configured to isolate vibrations generated by the pump during operation
Implementation Method 2
The corresponding protrusion/depression pairs prevent the pump from rotating around the central axis beyond a threshold amount
Data Source
AI summary
A vacuum system configured to mitigate damage or risk associated with a pump malfunction (e.g., an imbalance, a catastrophic failure, etc.). An exemplary vacuum pump includes a housing; a vibration isolator coupled to the vacuum pump housing and configured to isolate vibrations generated by the vacuum pump during operation; and a stop structure disposed between the vacuum pump housing and an adjacent fixture. The stop structure configured to prevent displacement of the vacuum pump housing relative to the fixture above a threshold amount, wherein the displacement of the vacuum pump housing is configured to be within the threshold amount during normal operation. The vacuum system may further include a collar configured to limit an axial displacement of the pump.