Vacuum Pump Mounting Arrangement for Crash Torque Absorption
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Solution Overview
Problem
Vacuum pumps with high-speed rotors face issues of rotational energy release during rotor-stator crashes, leading to potential twisting and leakage, which can cause environmental contamination and significant costs due to process interruptions, especially in industries like semiconductor manufacturing.
Innovation Solution
A crash-proof arrangement where the vacuum pump is connected to a chamber flange via a carrier with a screw and spacer sleeve, allowing secure transmission of rotational energy without twisting, maintaining vacuum tightness and protecting the intermediate component from damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the vacuum pump is mounted directly on the flange or slide, then the mounting structure is simple, but the system is vulnerable to twisting and leakage during rotor-stator crash
Solution Approach 1:
A carrier component is introduced as an intermediary between the vacuum pump and the flange/slide. This carrier absorbs the crash torques through its rigid screw-spacer sleeve connection to the flange, preventing these torques from being transmitted to the intermediate component (slide valve) and maintaining vacuum tightness throughout the connection.
2Strength
If the vacuum pump is fastened to the floor in addition to the flange, then the anti-twisting capability is improved, but distortion of the pump or slide occurs due to non-aligned fastening points
Solution Approach 1:
The anti-twisting function is segmented from the floor mounting and assigned to the carrier component. The carrier's screw-spacer sleeve connection to the flange provides the necessary rigid anti-twisting support locally at the pump connection point, eliminating the need for additional floor fastening points and avoiding alignment issues.
3Force
If a rigid connection is used between the vacuum pump and flange, then the torque transmission capability is improved, but the intermediate component is subjected to high stresses
Solution Approach 1:
The carrier acts as a mediator that absorbs the crash torques through its rigid screw-spacer sleeve connection to the flange. This prevents the high stresses from being transmitted to the intermediate component (such as slide valves), protecting it from damage while maintaining overall structural integrity.
4Strength
If the flange connection is designed to absorb high moments, then the crash torque resistance is improved, but the manufacturing cost and complexity increase
Solution Approach 1:
The crash torque absorption function is extracted from the flange design and assigned to a separate carrier component. The flange itself can remain a simple, standard component, while the carrier provides the necessary rigid screw-spacer sleeve connection to absorb the high moments, reducing overall system complexity and manufacturing cost.
Data Source
Figure 1
Figure 2
AI summary
The arrangement has a fast moving rotor (2) and a stator (3), a vacuum chamber (4) with a chamber flange (5) and an intermediate component (6) i.e. vacuum gate valve, provided between a vacuum pump (1) and the vacuum chamber. The vacuum chamber, the vacuum pump and the intermediate component are removably connected with each other. The vacuum pump is arranged at a connection unit (7) i.e. support, which is connected with the chamber flange in a secure crash moment manner. The support is arranged between the vacuum pump and the intermediate component.