Vacuum Pump With Nested Regenerative Mechanism
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing compound vacuum pumps face performance deterioration and increased power consumption when operating at higher backing pressures, particularly in differentially pumped mass spectrometer systems, due to limitations in turbo-molecular and molecular drag stage combinations.
Innovation Solution
Incorporating a regenerative pumping mechanism downstream of a molecular drag pumping mechanism, where the rotor element of the molecular drag mechanism surrounds the rotor elements of the regenerative mechanism, to reduce power consumption and improve performance while maintaining a compact pump size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the mass flow rate into the spectrometer is increased to improve mass spectrometer performance, then the pumping capacity requirement increases, but the backing pressure increases causing rapid deterioration in compound pump performance and increase in power consumption
Solution Approach 1:
The patent applies nesting by placing the regenerative pumping mechanism (with its rotor elements) inside the molecular drag pumping mechanism (with its rotor element). This nested configuration allows the regenerative pump to handle high mass flow rates at higher backing pressures while the molecular drag pump maintains the vacuum, resolving the contradiction between increased productivity and energy loss by combining two pumping mechanisms in a space-efficient manner
Solution Approach 2:
The patent uses a composite pumping system combining two different pumping mechanisms (regenerative and molecular drag) with different operating characteristics. The regenerative pump excels at handling high mass flow rates at higher pressures, while the molecular drag pump maintains high vacuum levels, creating a composite system that optimizes both productivity and energy efficiency across the entire pressure range
2Productivity
If the size or number of backing pumps is increased to accommodate increased mass flow rate, then the pumping capacity is sufficient, but the costs and the size of the overall pumping system increase
Solution Approach 1:
By nesting the regenerative pumping mechanism within the molecular drag pumping mechanism, the patent achieves increased pumping capacity for higher mass flow rates without proportionally increasing the overall system size. The nested configuration allows both pumping mechanisms to share the same spatial envelope, avoiding the need for separate large backing pumps
3Reliability
If turbo-molecular and molecular drag stage combinations are used to evacuate chambers, then the required vacuum levels are achieved, but performance deteriorates and power consumption increases at higher backing pressures
Solution Approach 1:
The patent creates a composite pumping system where the regenerative pump handles the high backing pressure and high mass flow rate conditions, while the molecular drag pump maintains the high vacuum level. This division of labor allows each mechanism to operate in its optimal pressure range, preventing performance deterioration and excessive power consumption that would occur if a single mechanism tried to handle all pressure ranges
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces power consumption and enhances pump performance at higher backing pressures, allowing for efficient operation with minimal increase in pump size and enabling the vacuum pump to manage higher mass flow rates without the need for larger backing pumps.
Implementation Method 1
a molecular drag pumping mechanism
Implementation Method 2
a regenerative pumping mechanism, wherein a rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism
Data Source
AI summary
A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism.